Patents by Inventor Zdenek Pelcbauer

Zdenek Pelcbauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4269962
    Abstract: The invention relates to a negative electron resist for application in electron lithography. It consists of an organic copolymer formed by copolymerization of butadiene or isoprene with glycidyl acrylate or glycidyl methacrylate. The resist exhibits the high sensitivity to irradiation by electrons and, at the same time, a good adhesion to the base and a resistance towards common etching agents. The copolymer is advantageously prepared by radical polymerization and a high purity of the product does not require further purification. The electron resist manufactured in this way has the long-term workability.
    Type: Grant
    Filed: October 27, 1978
    Date of Patent: May 26, 1981
    Assignee: Ceskoslovenska akademie ved
    Inventors: Jaroslav Kalal, Bohumil Bednar, Jaromir Zachoval, Jiri Petr, Zdenek Pelcbauer, Frantisek Svec