Abstract: A dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film is provided. The laminated film can include Si layers and SiGe layers alternately and repeatedly laminated. Each of the SiGe layers can be plasma-etched with plasma generated by a pulse-modulated radio frequency power using NF3 gas.

Abstract: A dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film is provided. The laminated film can include Si layers and SiGe layers alternately and repeatedly laminated. Each of the SiGe layers can be plasma-etched with plasma generated by a pulse-modulated radio frequency power using NF3 gas.

Abstract: In a dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film composed of the Si layers and SiGe layers alternately and repeatedly laminated, the each of the SiGe layers is plasma-etched with pulse-modulated plasma using NF3 gas.

Abstract: A carrier for a disk drive includes a back member configured to abut a face of the disk drive; a pair of side members coupled to the back member, configured to abut opposing sides of the disk drive; and a pair of flexible tangs, each tang coupled to one of the side members and configured to removably mount the carrier in a base. The back member is, or the side members are, or the back member and side members are, configured with a set of attachment mechanisms in locations that correspond to locations, in the disk drive, of screw holes used for mounting so that the disk drive is removably mountable in the carrier using the attachment mechanisms and an assembly of the carrier with the disk drive is removably mountable in the base.

Abstract: An electrode alignment device and weld head for automated welding machines includes a base member, a gap wheel, an electrode holder and a coupling rod. The gap wheel includes a plurality of graduations, where each graduation corresponds to a predetermined electrode spacing for an automated welding process. In one embodiment, the graduations in the gap wheel comprise pairs of apertures, with a first aperture for engaging an alignment post on the base member, and a second aperture for engaging an alignment post on the electrode holder. Among the graduations, the spacing between the first and second apertures is different. As such, the electrode spacing may easily and accurately be changed by disengaging the coupling rod, rotating the gap wheel to the proper graduation, and reengaging the coupling rod.