Abstract: A large-scale denudation depth thematic mapping method, which includes: creating a rule for arranging field work point and field work route, a sampling rule, a field observation and recording rule and a mineral processing rule of a research area. Analyzing a target mineral selected at each field work point by using a thermochronology research method and inputting analysis data into a Low-T Thermo software to perform thermal evolution history modeling and denudation depth calculation, so as to obtain a denudation depth at each of the field work points. Drawing a denudation depth isopleth map of the research area according to the denudation depth at each of the field work points; and setting a large-scale standard regional geological map of the research area as a base map. Superimposing the base map and the denudation depth isopleth map to obtain a denudation depth map of the research area.

Abstract: Disclosed are a method for dissolving a single-particle titanite and a method for determining an age of a single-particle titanite by (uranium-thorium)/helium dating, relating to the technical field of mineral isotope chronometry. A dissolution method exclusive to the single-particle titanite is provided. In the method for determining the age of the single-particle titanite by (uranium-thorium)/helium dating, contents of uranium, thorium, and helium are obtained by measuring a same sample, which are then substituted into a (uranium-thorium)/helium age equation to directly obtain an age value.

Abstract: A large-scale denudation depth thematic mapping method, which includes: creating a rule for arranging field work point and field work route, a sampling rule, a field observation and recording rule and a mineral processing rule of a research area. Analyzing a target mineral selected at each field work point by using a thermochronology research method and inputting analysis data into a Low-T Thermo software to perform thermal evolution history modeling and denudation depth calculation, so as to obtain a denudation depth at each of the field work points. Drawing a denudation depth isopleth map of the research area according to the denudation depth at each of the field work points; and setting a large-scale standard regional geological map of the research area as a base map. Superimposing the base map and the denudation depth isopleth map to obtain a denudation depth map of the research area.

Abstract: A dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film is provided. The laminated film can include Si layers and SiGe layers alternately and repeatedly laminated. Each of the SiGe layers can be plasma-etched with plasma generated by a pulse-modulated radio frequency power using NF3 gas.

Abstract: A dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film is provided. The laminated film can include Si layers and SiGe layers alternately and repeatedly laminated. Each of the SiGe layers can be plasma-etched with plasma generated by a pulse-modulated radio frequency power using NF3 gas.

Abstract: In a dry etching method for isotropically etching each of SiGe layers selectively relative to each of Si layers in a laminated film composed of the Si layers and SiGe layers alternately and repeatedly laminated, the each of the SiGe layers is plasma-etched with pulse-modulated plasma using NF3 gas.