Abstract: Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.

Abstract: A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z?1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.