Patents by Inventor Zefram D. Marks

Zefram D. Marks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum actuator containment for molecular contaminant and particle mitigation
    Patent number: 11156926
    Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: October 26, 2021
    Assignee: KLA Corporation
    Inventors: Zefram D. Marks, Gildardo R. Delgado, Rudy Garcia, Joseph Walsh, Matthew Hoffman
  • VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE MITIGATION
    Publication number: 20210048756
    Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 18, 2021
    Inventors: Zefram D. Marks, Gildardo R. Delgado, Rudy Garcia, Joseph Walsh, Matthew Hoffman