Patents by Inventor Zengyan Fan

Zengyan Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12191271
    Abstract: The present application provides a semiconductor structure and a forming method thereof. The method of forming the semiconductor structure includes: providing a semiconductor chip and a substrate; forming, on the substrate, a first covering film covering a metal pad and a surface of the substrate, a plurality of up-narrow and down-wide openings being formed in the first covering film, and a bottom of each of the up-narrow and down-wide openings correspondingly exposing a surface of the metal pad; and flipping the semiconductor chip onto the substrate, such that a solder bump on a metal pillar is correspondingly located in the up-narrow and down-wide opening, and the solder bump fill the up-narrow and down-wide opening.
    Type: Grant
    Filed: April 29, 2022
    Date of Patent: January 7, 2025
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan Fan
  • Patent number: 12176311
    Abstract: A method for forming a micro bump includes the following operations. A chip at least including a silicon substrate and a Through Silicon Via (TSV) penetrating through the silicon substrate is provided. A conductive layer having a first preset size in a first direction is formed in the TSV, the first direction being a thickness direction of the silicon substrate. A connecting layer having a second preset size in the first direction is formed on a surface of the conductive layer in the TSV, where a sum of the first preset size and the second preset size is equal to an initial size of the TSV in the first direction. The silicon substrate is processed to expose the connecting layer, for forming a micro bump corresponding to the TSV.
    Type: Grant
    Filed: February 12, 2022
    Date of Patent: December 24, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan Fan
  • Patent number: 12132022
    Abstract: The present disclosure provides a semiconductor device and a preparation method thereof. The semiconductor device comprises: a semiconductor substrate; a passivation layer, arranged on an upper surface of the semiconductor substrate; a protective layer, arranged on an upper surface of the passivation layer, a dummy opening being formed on the protective layer; and, a dummy bump, partially located in the dummy opening and closely attached to the protective layer.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: October 29, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan Fan
  • Patent number: 11978698
    Abstract: A method for forming the packaging structure includes: providing a substrate; forming a plurality of mutually independent conductive wires on the substrate, wherein a trench is provided between adjacent conductive wires; oxidizing side walls of each of the conductive wires to form a barrier layer; and forming a solder mask at least filling the trench.
    Type: Grant
    Filed: January 5, 2022
    Date of Patent: May 7, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan Fan
  • Publication number: 20240096700
    Abstract: A semiconductor structure, a method for preparing the semiconductor structure and a memory are provided. The method includes: providing a wafer in which multiple conductive pillars are formed; inverting the wafer and performing etching on a back plane of the wafer to expose each conductive pillar from the back plane of the wafer, and lengths of the multiple conductive pillars exposed to the back plane are different; depositing an insulation layer on the back plane of the wafer and the conductive pillars, and depositing a filling layer on the insulation layer, the filling layer completely covering back ends of the multiple conductive pillars; and performing polishing on the filling layer and back ends of a part of the conductive pillars, until a back end of each conductive pillar is exposed and the back ends of the multiple conductive pillars are flush with a back plane of the filling layer.
    Type: Application
    Filed: February 14, 2023
    Publication date: March 21, 2024
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan FAN
  • Publication number: 20230223369
    Abstract: The present application provides a semiconductor structure and a forming method thereof. The method of forming the semiconductor structure includes: providing a semiconductor chip and a substrate; forming, on the substrate, a first covering film covering a metal pad and a surface of the substrate, a plurality of up-narrow and down-wide openings being formed in the first covering film, and a bottom of each of the up-narrow and down-wide openings correspondingly exposing a surface of the metal pad; and flipping the semiconductor chip onto the substrate, such that a solder bump on a metal pillar is correspondingly located in the up-narrow and down-wide opening, and the solder bump fill the up-narrow and down-wide opening.
    Type: Application
    Filed: April 29, 2022
    Publication date: July 13, 2023
    Inventor: Zengyan FAN
  • Publication number: 20230223368
    Abstract: Embodiments of the present disclosure relate to a semiconductor structure and a manufacturing method thereof. The method includes: providing a base, wherein a pad is provided on the base; forming an insulating layer on the base, wherein the insulating layer is provided with an opening that exposes the pad; forming a first metal bump in the opening, wherein the first metal bump is in contact with the pad; forming a second metal bump on an upper surface of the insulating layer; forming an insulation structure at least on the upper surface of the insulating layer, wherein the insulation structure is in contact with a sidewall of the second metal bump. An adhesion between the insulation structure and the insulating layer is greater than an adhesion between the second metal bump and the insulating layer.
    Type: Application
    Filed: April 29, 2022
    Publication date: July 13, 2023
    Inventor: Zengyan FAN
  • Publication number: 20230197666
    Abstract: A chip packaging structure and a method for preparing the same, and a method for packaging a semiconductor structure are provided, which relate to the technical field of semiconductors, and solve the technical problem of low yield of a chip. The chip packaging structure includes: a chip, an intermediate insulating layer arranged on the chip and a non-conductive adhesive layer arranged on the intermediate insulating layer, where a plurality of conductive pillar bumps are arranged on the chip, and each conductive pillar bump penetrates through the intermediate insulating layer; the intermediate insulating layer is provided with at least one group of holding holes, and the non-conductive adhesive layer fills the holding holes, so that grooves respectively matched with the holding holes are formed in a surface, far away from the intermediate insulating layer, of the non-conductive adhesive layer.
    Type: Application
    Filed: February 15, 2023
    Publication date: June 22, 2023
    Inventor: Zengyan FAN
  • Publication number: 20230054495
    Abstract: The present disclosure provides a semiconductor device and a preparation method thereof. The semiconductor device comprises: a semiconductor substrate; a passivation layer, arranged on an upper surface of the semiconductor substrate; a protective layer, arranged on an upper surface of the passivation layer, a dummy opening being formed on the protective layer; and, a dummy bump, partially located in the dummy opening and closely attached to the protective layer.
    Type: Application
    Filed: March 8, 2021
    Publication date: February 23, 2023
    Inventor: Zengyan Fan
  • Publication number: 20230005869
    Abstract: A method for forming a micro bump includes the following operations. A chip at least including a silicon substrate and a Through Silicon Via (TSV) penetrating through the silicon substrate is provided. A conductive layer having a first preset size in a first direction is formed in the TSV, the first direction being a thickness direction of the silicon substrate. A connecting layer having a second preset size in the first direction is formed on a surface of the conductive layer in the TSV, where a sum of the first preset size and the second preset size is equal to an initial size of the TSV in the first direction. The silicon substrate is processed to expose the connecting layer, for forming a micro bump corresponding to the TSV.
    Type: Application
    Filed: February 12, 2022
    Publication date: January 5, 2023
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan FAN
  • Publication number: 20220344251
    Abstract: A method for forming the packaging structure includes: providing a substrate; forming a plurality of mutually independent conductive wires on the substrate, wherein a trench is provided between adjacent conductive wires; oxidizing side walls of each of the conductive wires to form a barrier layer; and forming a solder mask at least filling the trench.
    Type: Application
    Filed: January 5, 2022
    Publication date: October 27, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zengyan FAN
  • Publication number: 20220223560
    Abstract: A chip structure, a packaging structure and a manufacturing method of the chip structure are provided. The chip structure includes a base and an electrically conductive interconnection layer. An upper surface of the base is provided with a plurality of bonding pads, and at least two of the bonding pads have same properties. The electrically conductive interconnection layer includes a plurality of electrically conductive interconnection structures. The electrically conductive interconnection structure electrically connects the bonding pads having same properties, and is configured to be electrically connected with a pin on a packaging substrate.
    Type: Application
    Filed: September 7, 2021
    Publication date: July 14, 2022
    Inventor: Zengyan FAN
  • Publication number: 20220052008
    Abstract: The disclosure relates to a semiconductor structure, including: a substrate, a bonding pad, a first protective layer, a redistribution layer, a connecting plug, bumps, and a second protective layer. The redistribution layer includes a first metal line and a second metal line. Since the second metal line and the first metal line are of the same height, so the bumps on the first metal line and the second metal line are equivalently formed on the same layer. The coplanarity of the bumps on the metal lines is relatively high. The second metal line does not make any electrical connection to the pad so the bumps formed on the second metal line do not play a conductive role. When the substrate warps, the stress is transferred to the first protective layer. Thus, bumps in the substrate made according to the present application are coplanar, which reduces the probability of poor wetting when flip-chip package on the substrate, and improves the reliability of the entire package.
    Type: Application
    Filed: June 19, 2020
    Publication date: February 17, 2022
    Inventor: Zengyan Fan