Patents by Inventor Zeqing Sun

Zeqing Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11187662
    Abstract: A device and a method for simultaneously inspecting defects of a surface and a subsurface of an optical element are provided. Combined with laser-induced ultrasound and laser scattering inspection technologies, through generating acoustic sound waves on the surface and the subsurface of the optical element to be tested by lasers, a static light scattering effect of subsurface defects under modulation of the acoustic sound wave is observed and analyzed; through analyzing amplitude and phase changes of scattered light intensity and reflected light intensity, inspection for the defects of the surface and the subsurface of the optical element is realized. The present invention can be applied in quality inspection of precise optical elements, especially in finished product inspection of ultra-precise optical elements having strict requirements on the subsurface defects.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: November 30, 2021
    Assignee: ZHEJIANG UNIVERSITY
    Inventors: Anyu Sun, Zhihong Li, Bingfeng Ju, Chuanyong Wang, Xiaoyu Yang, Zeqing Sun, Huilin Du
  • Publication number: 20210055230
    Abstract: A device and a method for simultaneously inspecting defects of a surface and a subsurface of an optical element are provided. Combined with laser-induced ultrasound and laser scattering inspection technologies, through generating acoustic sound waves on the surface and the subsurface of the optical element to be tested by lasers, a static light scattering effect of subsurface defects under modulation of the acoustic sound wave is observed and analyzed; through analyzing amplitude and phase changes of scattered light intensity and reflected light intensity, inspection for the defects of the surface and the subsurface of the optical element is realized. The present invention can be applied in quality inspection of precise optical elements, especially in finished product inspection of ultra-precise optical elements having strict requirements on the subsurface defects.
    Type: Application
    Filed: August 2, 2019
    Publication date: February 25, 2021
    Inventors: Anyu Sun, Zhihong Li, Bingfeng Ju, Chuanyong Wang, Xiaoyu Yang, Zeqing Sun, Huilin Du