Abstract: Methods of selectively depositing a carbon-containing layer are described. Exemplary processing methods may include flowing a first precursor over a substrate comprising a metal surface and a non-metal surface to form a first portion of an initial carbon-containing film on the metal surface. The methods may include removing a first precursor effluent from the substrate. A second precursor may then be flowed over the substrate to react with the first portion of the initial carbon-containing layer. The methods may include removing a second precursor effluent from the substrate. The methods may include pre-treating the metal surface of the substrate to form a metal oxide surface on the metal surface.

Abstract: Embodiments of the present technology relate to semiconductor processing methods that include providing a structured semiconductor substrate including a trench having a bottom surface and top surfaces. The methods further include depositing a portion of a silicon-containing material on the bottom surface of the trench for at least one deposition cycle, where each deposition cycle includes: depositing the portion of the silicon-containing material on the bottom surface and top surfaces of the trench, depositing a carbon-containing mask layer on the silicon-containing material on the bottom surface of the trench, where the carbon-containing mask layer is not formed on the top surfaces of the trench, removing the portion of the silicon-containing material from the top surfaces of the trench, and removing the carbon-containing mask layer from the silicon-containing material on the bottom surface of the trench, where the as-deposited silicon-containing material remains on the bottom surface of the trench.

Abstract: The present disclosure provides a projection system and a control method thereof, comprising: a light source system, configured to sequentially generate primary light of three colors; a light modulation system comprising at least one light modulator configured to module the primary light; and a control system, configured to: divide time duration of each primary light in each source image frame into a plurality of modulation periods according to the number of gray scales, sequentially arrange the modulation periods, wherein at least two modulation periods of at least one primary light are arranged with an interval, and control the light source system to generate the primary light of the corresponding color in each modulation period according to a sequence of the modulation periods, and control the at least one light modulator to modulate the primary light of the corresponding color.

Abstract: The present disclosure provides a projection system and a control method thereof, comprising: a light source system, configured to sequentially generate primary light of three colors; a light modulation system comprising at least one light modulator configured to module the primary light; and a control system, configured to: divide time duration of each primary light in each source image frame into a plurality of modulation periods according to the number of gray scales, sequentially arrange the modulation periods, wherein at least two modulation periods of at least one primary light are arranged with an interval, and control the light source system to generate the primary light of the corresponding color in each modulation period according to a sequence of the modulation periods, and control the at least one light modulator to modulate the primary light of the corresponding color.