Patents by Inventor Özer DUMAN

Özer DUMAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus
    Patent number: 12405542
    Abstract: A method of determining a mark measurement sequence for an object comprising a plurality of marks, the method including: receiving location data for the plurality of marks that are to be measured; obtaining a boundary model of a positioning device used for performing the mark measurement sequence; and determining the mark measurement sequence based on the location data and the boundary model.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: September 2, 2025
    Assignee: ASML NETHERLANDS B.V.
    Inventors: István Nagy, Özer Duman, Arjan Gijsbertsen, Pieter Jacob Heres, Rudolf Michiel Hermans, Erik Jansen, Thomas Augustus Mattaar, Norbertus Josephus Martinus Van Den Nieuwelaar, Petrus Franciscus Van Gils
  • METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
    Publication number: 20220260933
    Abstract: A method of determining a mark measurement sequence for an object comprising a plurality of marks, the method including: receiving location data for the plurality of marks that are to be measured; obtaining a boundary model of a positioning device used for performing the mark measurement sequence; and determining the mark measurement sequence based on the location data and the boundary model.
    Type: Application
    Filed: July 16, 2020
    Publication date: August 18, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: István NAGY, Özer DUMAN, Arjan GIJSBERTSEN, Pieter Jacob HERES, Rudolf Michiel HERMANS, Erik JANSEN, Thomas Augustus MATTAAR, Norbertus Josephus Martinus VAN DEN NIEUWELAAR, Petrus Franciscus VAN GILS