Patents by Inventor Zeyu Benjamin Wu

Zeyu Benjamin Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

LIQUID TITANIUM OXIDE COMPOSITIONS, METHODS FOR FORMING THE SAME, AND METHODS FOR ETCHING MATERIAL LAYERS OF OR OVERLYING SUBSTRATES USING THE SAME

Publication number: 20160148814

Abstract: Liquid titanium oxide compositions, methods for forming such compositions, and methods for etching material layers using such compositions are provided. In accordance with an exemplary embodiment, a liquid titanium oxide composition contains a solvent system, an organotitanate, and a high boiling point solvent having a boiling point in the range of about 140° C. to about 400° C.

Type: Application

Filed: June 2, 2014

Publication date: May 26, 2016

Inventors: Helen X. Xu, Richard Alan Spear, Roger Y. Leung, Lea Marie Metin, Songyuan Xie, Zeyu Benjamin Wu, Joseph Kennedy

LIQUID TITANIUM OXIDE COMPOSITIONS, METHODS FOR FORMING THE SAME, AND METHODS FOR ETCHING MATERIAL LAYERS OF OR OVERLYING SUBSTRATES USING THE SAME