Patents by Inventor Zhaowei Chen

Zhaowei Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11967497
    Abstract: A method for cleaning semiconductor substrate without damaging patterned structure on the semiconductor substrate using ultra/mega sonic device comprises applying liquid into a space between a substrate and an ultra/mega sonic device; setting an ultra/mega sonic power supply at frequency f1 and power P1 to drive the ultra/mega sonic device; before bubble cavitation in the liquid damaging patterned structure on the substrate, setting the ultra/mega sonic power supply at zero output; after temperature inside bubble cooling down to a set temperature, setting the ultra/mega sonic power supply at frequency f1 and power P1 again; detecting power on time at power P1 and frequency f1 and power off time separately or detecting amplitude of each waveform output by the ultra/mega sonic power supply; comparing the detected power on time with a preset time ?1, or comparing the detected power off time with a preset time ?2, or comparing detected amplitude of each waveform with a preset value, if the detected power on time
    Type: Grant
    Filed: January 13, 2022
    Date of Patent: April 23, 2024
    Assignee: ACM Research (Shanghai) Inc.
    Inventors: Jun Wang, Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang, Yinuo Jin, Zhaowei Jia, Liangzhi Xie, Xuejun Li
  • Patent number: 11911808
    Abstract: A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.
    Type: Grant
    Filed: March 9, 2023
    Date of Patent: February 27, 2024
    Assignee: ACM Research (Shanghai) Inc.
    Inventors: Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang, Yinuo Jin, Zhaowei Jia, Liangzhi Xie, Jun Wang, Xuejun Li
  • Publication number: 20230126077
    Abstract: Disclosed herein is a particle containing an inner liposomal vesicle (ILV) encapsulating a therapeutic agent; an outer liposomal vesicle (OLV) encapsulating the ILV; a membrane fusion-promoting agent; and a pH-altering agent. Also disclosed are methods of delivering a therapeutic agent to a subject comprising: a) providing a herein disclosed particle b) triggering ILV and OLV fusion; and c) releasing the therapeutic agent outside of the OLV. Also disclosed are methods for treating a disease in a subject in need thereof comprising: administering to a subject a herein disclosed particle. Also disclosed are methods to release insulin to an environment comprising increased glucose levels, the method comprising exposing to the environment a herein disclosed particle.
    Type: Application
    Filed: July 13, 2022
    Publication date: April 27, 2023
    Inventors: Zhen GU, Zhaowei CHEN
  • Patent number: 11428440
    Abstract: A porphyrine organic framework (“POF”) material is introduced with a one-pot method for photothermal material fabrication. The POF material may be deposited on a support scaffold by reacting a pyrrole by acid-catalyzed dehydration forming a plurality of porphyrin-based covalent organic frameworks particles on the support scaffold.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: August 30, 2022
    Assignee: UChicago Argonne, LLC
    Inventors: Zijing Xia, Hao-Cheng Yang, Zhaowei Chen, Seth B. Darling
  • Patent number: 11389405
    Abstract: Disclosed herein is a particle containing an inner liposomal vesicle (ILV) encapsulating a therapeutic agent; an outer liposomal vesicle (OLV) encapsulating the ILV; a membrane fusion-promoting agent; and a pH-altering agent. Also disclosed are methods of delivering a therapeutic agent to a subject comprising: a) providing a herein disclosed particle b) triggering ILV and OLV fusion; and c) releasing the therapeutic agent outside of the OLV. Also disclosed are methods for treating a disease in a subject in need thereof comprising: administering to a subject a herein disclosed particle. Also disclosed are methods to release insulin to an environment comprising increased glucose levels, the method comprising exposing to the environment a herein disclosed particle.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: July 19, 2022
    Assignee: North Carolina State University
    Inventors: Zhen Gu, Zhaowei Chen
  • Patent number: 11359840
    Abstract: Chinese ink is applied on various materials and stabilized by atomic layer deposition to fabricate solar steam generation devices. The encapsulated ink has excellent photothermal properties and evaporation efficiency under simulated sunlight, holding great promise in solar evaporation device applications.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: June 14, 2022
    Assignee: UChicago Argonne, LLC
    Inventors: Hao-Cheng Yang, Seth B. Darling, Yunsong Xie, Zhaowei Chen, Jeffrey W. Elam
  • Publication number: 20210060164
    Abstract: A method for performing deep tissue stimulation using radiation-enabled optogenetics including introducing a plurality of nanoscintillators into a region with light sensitive cells, and targeting the nanoscintillators with a primary radiation to cause the nanoscintillators to emit optical energy. The light sensitive cells having an optically active wavelength range, and the emitted optical energy having a wavelength in the optically active wavelength range. In particular, introducing X-ray excited optical luminescent nanomaterials to a tissue region and controlling electrical activity in cells containing opsins.
    Type: Application
    Filed: August 27, 2019
    Publication date: March 4, 2021
    Inventors: Elena A. Rozhkova, Zhaowei Chen, Vassiliy Tsytsarev
  • Publication number: 20200355403
    Abstract: A porphyrine organic framework (“POF”) material is introduced with a one-pot method for photothermal material fabrication. The POF material may be deposited on a porous substrate, such as for solar steam generation.
    Type: Application
    Filed: May 9, 2019
    Publication date: November 12, 2020
    Applicant: UCHICAGO ARGONNE, LLC
    Inventors: Zijing Xia, Hao-Cheng Yang, Zhaowei Chen, Seth B. Darling
  • Publication number: 20200253869
    Abstract: Disclosed herein is a particle containing an inner liposomal vesicle (ILV) encapsulating a therapeutic agent; an outer liposomal vesicle (OLV) encapsulating the ILV; a membrane fusion-promoting agent; and a pH-altering agent. Also disclosed are methods of delivering a therapeutic agent to a subject comprising: a) providing a herein disclosed particle b) triggering ILV and OLV fusion; and c) releasing the therapeutic agent outside of the OLV. Also disclosed are methods for treating a disease in a subject in need thereof comprising: administering to a subject a herein disclosed particle. Also disclosed are methods to release insulin to an environment comprising increased glucose levels, the method comprising exposing to the environment a herein disclosed particle.
    Type: Application
    Filed: September 17, 2018
    Publication date: August 13, 2020
    Inventors: Zhen GU, Zhaowei CHEN
  • Publication number: 20200041169
    Abstract: Chinese ink is applied on various materials and stabilized by atomic layer deposition to fabricate solar steam generation devices. The encapsulated ink has excellent photothermal properties and evaporation efficiency under simulated sunlight, holding great promise in solar evaporation device applications.
    Type: Application
    Filed: August 2, 2018
    Publication date: February 6, 2020
    Applicant: UCHICAGO ARGONNE, LLC
    Inventors: Hao-Cheng Yang, Seth B. Darling, Yunsong Xie, Zhaowei Chen, Jeffrey W. Elam