Patents by Inventor Zhaoxiang CHU

Zhaoxiang CHU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Projection objective
    Patent number: 10983442
    Abstract: A projection objective, used for projecting an object space to an image space. The objective includes, from the object space along an optical axis in sequence: a first lens set (G1) having positive focal power, a second lens set (G2) having negative focal power, a third lens set (G3) having positive focal power, a fourth lens set (G4) having negative focal power, and a fifth lens set (G5) having positive focal power. Aspheric lenses are provided in the first lens set (G1), the second lens set (G2), the third lens set (G3), the fourth lens set (G4), and the fifth lens set (G5).
    Type: Grant
    Filed: September 29, 2018
    Date of Patent: April 20, 2021
    Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
    Inventors: Fuping An, Zhaoxiang Chu, Yinzhang Guo
  • PROJECTION OBJECTIVE
    Publication number: 20200310256
    Abstract: A projection objective, used for projecting an object space to an image space. The objective includes, from the object space along an optical axis in sequence: a first lens set (G1) having positive focal power, a second lens set (G2) having negative focal power, a third lens set (G3) having positive focal power, a fourth lens set (G4) having negative focal power, and a fifth lens set (G5) having positive focal power. Aspheric lenses are provided in the first lens set (G1), the second lens set (G2), the third lens set (G3), the fourth lens set (G4), and the fifth lens set (G5).
    Type: Application
    Filed: September 29, 2018
    Publication date: October 1, 2020
    Inventors: Fuping AN, Zhaoxiang CHU, Yinzhang GUO