Abstract: Provided herein are methods for forming a layer on a substrate wherein the layer is formed selectively on a first region of the substrate relative to a second region having a composition different than the first region. Methods of the invention include selectively forming a layer using an inhibitor agent capable of reducing the average acidity of a first region of the substrate having a composition characterized by a plurality of hydroxyl groups. Methods of the invention include selectively forming a layer by exposure of the substrate to: (i) an inhibitor agent comprising a substituted or an unsubstituted amine group, a substituted or an unsubstituted pyridyl group, a carbonyl group, or a combination of these, and (ii) a precursor gas comprising one or more ligands selected from the group consisting of a carbonyl group, an allyl group, combination thereof.

Abstract: Methods for filling a substrate feature with a seamless dielectric gap fill are described. Methods comprise sequentially depositing a film with a seam and partially etching the film in the same processing chamber. Methods and apparatus allow for the same hardware to be used for PEALD deposition of a film as well as plasma etch of the film.

Abstract: Embodiments of this disclosure relate to methods for depositing gapfill materials by a plasma ALD cycle including a plasma deactivation outside of and near the top of the substrate feature. Some embodiments of the disclosure relate to methods for filling reentrant features without void formation. In some embodiments, the gapfill material comprises one or more of silicon nitride and titanium nitride.

Abstract: A set-top box receives media information including media identification and position information from a portable device in wireless communication with a mobile entertainment system. The media information is parsed, using a local or an internet based search, to locate the media information including the media identification and position information that matches a broadcast program or recorded media content from a network accessible to the mobile entertainment system. Upon locating the media information that matches the broadcast program or recorded media content, the matching broadcast program or recorded media content is downloaded and played on at least one of a display device or an audio receiver accessible to the set-top box or the headend of the IP, cable or satellite network.

Abstract: A set-top box receives media information including media identification and position information from a portable device in wireless communication with a mobile entertainment system. The media information is parsed, using a local or an internet based search, to locate the media information including the media identification and position information that matches a broadcast program or recorded media content from a network accessible to the mobile entertainment system. Upon locating the media information that matches the broadcast program or recorded media content, the matching broadcast program or recorded media content is downloaded and played on at least one of a display device or an audio receiver accessible to the set-top box or the headend of the IP, cable or satellite network.