Abstract: A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed space apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Abstract: A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Abstract: A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Abstract: A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Abstract: A capacitive ultrasonic transducer and method of fabricating the same are disclosed, whereas the capacitive ultrasonic transducer is a stacking of multiple metal layers. The fabrication method of the invention is characterized in that: the structure and cavity of excitation are formed by lithographing and etching the sacrificial layer and other stacking layers, whereas the sacrificial layer and the other stacking layer are made of metal, and moreover, a protective bulk is formed on the capacitive ultrasonic transducer by a means of metal depositing. It is noted that not only the structure of capacitive ultrasonic transducer of the invention has a bulk for protection, which is different to that of a conventional capacitive ultrasonic transducer, but also the method of fabricating the same can do without the steps of electrode formation, high-temperature processing and annealing, which enable the method to have simplified process and thus cost less than that of conventional methods.