Patents by Inventor Zheng-En BAO

Zheng-En BAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR STRUCTURE FORMATION
    Publication number: 20230282513
    Abstract: A recovery layer (e.g., a layer of organic and/or tin-based material) is formed within recesses, in which adjacent MEOL or BEOL structures are formed, after plasma ashing and before a trimming process. The recovery layer preserves hardmask material and dielectric material such that upper surfaces of the adjacent MEOL or BEOL structures remain physically separated. As a result, the adjacent MEOL or BEOL remain electrically isolated and functional.
    Type: Application
    Filed: March 7, 2022
    Publication date: September 7, 2023
    Inventors: Zheng-En BAO, Po-Ju CHEN, Chih-Teng LIAO, Jiann-Horng LIN, Lin-Ting LIN