Patents by Inventor ZHENGHAO GAN
ZHENGHAO GAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11417645Abstract: An electrostatic discharge protection structure includes a laterally diffused metal oxide semiconductor (LDMOS) device. The LDMOS device includes an embedded bipolar junction transistor. A gate, a source, a buried layer lead-out area, and a substrate lead-out area of the LDMOS device are grounded. A drain and a body region lead-out area of the LDMOS device are electrically connected to a pad input/output terminal. In an embodiment, the embedded bipolar junction transistor includes a PNP transistor operative to transmit a reverse electrostatic discharge current. An N+ drain, a gate, an N+ source, and a P+ substrate lead-out area form a grounded-gate NMOS (GGNMOS) operative to transmit a forward electrostatic discharge current.Type: GrantFiled: January 28, 2016Date of Patent: August 16, 2022Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Patent number: 11114548Abstract: The present disclosure relates to the field of semiconductor technologies, and discloses semiconductor devices and manufacturing methods for the same. A semiconductor device may include: a substrate; a first active region on the substrate; a first gate structure positioned on the first active region; and a first source and a first drain that are positioned in the first active region and respectively on two sides of the first gate structure, where a size of the first drain is larger than a size of the first source. In forms of the present disclosure, because the size of the first drain is larger than the size of the first source, a current from the first drain to the first source is greater than a current from the first source to the first drain, so that the semiconductor device can make a read current relatively low and a write current relatively high in a static random access memory (SRAM), thereby improving a read margin and a write margin.Type: GrantFiled: October 21, 2019Date of Patent: September 7, 2021Assignees: Semiconductor Manufacturing (Shanghai) International Corporation, Semiconductor Manufacturing (Beijing) International CorporationInventors: Zhenghao Gan, Junhong Feng
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Publication number: 20200052093Abstract: The present disclosure relates to the field of semiconductor technologies, and discloses semiconductor devices and manufacturing methods for the same. A semiconductor device may include: a substrate; a first active region on the substrate; a first gate structure positioned on the first active region; and a first source and a first drain that are positioned in the first active region and respectively on two sides of the first gate structure, where a size of the first drain is larger than a size of the first source. In forms of the present disclosure, because the size of the first drain is larger than the size of the first source, a current from the first drain to the first source is greater than a current from the first source to the first drain, so that the semiconductor device can make a read current relatively low and a write current relatively high in a static random access memory (SRAM), thereby improving a read margin and a write margin.Type: ApplicationFiled: October 21, 2019Publication date: February 13, 2020Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Zhenghao Gan, Junhong Feng
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Semiconductor device providing improved read and write margin, and manufacturing method for the same
Patent number: 10490652Abstract: The present disclosure relates to the field of semiconductor technologies, and discloses semiconductor devices and manufacturing methods for the same. A semiconductor device may include: a substrate; a first active region on the substrate; a first gate structure positioned on the first active region; and a first source and a first drain that are positioned in the first active region and respectively on two sides of the first gate structure, where a size of the first drain is larger than a size of the first source. In forms of the present disclosure, because the size of the first drain is larger than the size of the first source, a current from the first drain to the first source is greater than a current from the first source to the first drain, so that the semiconductor device can make a read current relatively low and a write current relatively high in a static random access memory (SRAM), thereby improving a read margin and a write margin.Type: GrantFiled: June 1, 2018Date of Patent: November 26, 2019Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Zhenghao Gan, Junhong Feng -
Patent number: 10267840Abstract: A method for testing inter-layer connections is presented. The method entails: providing a test semiconductor device, wherein the test semiconductor device comprises a two-port resistance network; measuring base input resistances on at least one of the first and the second ports of the test semiconductor device for different numbers of resistance links in a defect-free circumstance; obtaining a correspondence relationship between the number of resistance links and the base input resistances; measuring actual input resistances on at least one of the first and the second ports of the test semiconductor device; and determining a position of the resistance link corresponding to the actual input resistances based on the correspondence relationship, wherein the position of the resistance link determines the location of a defect. This method can promptly locate a defect in inter-layer components and can reduce test time and simplify test procedures.Type: GrantFiled: September 19, 2017Date of Patent: April 23, 2019Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Publication number: 20180350916Abstract: The present disclosure relates to the field of semiconductor technologies, and discloses semiconductor devices and manufacturing methods for the same. A semiconductor device may include: a substrate; a first active region on the substrate; a first gate structure positioned on the first active region; and a first source and a first drain that are positioned in the first active region and respectively on two sides of the first gate structure, where a size of the first drain is larger than a size of the first source. In forms of the present disclosure, because the size of the first drain is larger than the size of the first source, a current from the first drain to the first source is greater than a current from the first source to the first drain, so that the semiconductor device can make a read current relatively low and a write current relatively high in a static random access memory (SRAM), thereby improving a read margin and a write margin.Type: ApplicationFiled: June 1, 2018Publication date: December 6, 2018Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Zhenghao Gan, Junhong Feng
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Patent number: 10073935Abstract: A circuit model of a Zener diode includes a forward bias diode, a reverse bias diode, a first resistor, a second resistor, and a voltage source. The forward bias diode and the first resistor are connected in series and form a first branch disposed between a positive terminal and a negative terminal. The voltage source, the reverse bias diode and the second resistor are connected in series and form a second branch, which is disposed between the positive terminal and the negative terminal and connected in parallel with the first branch. The circuit model can specifically describe the current-voltage characteristics of the Zener diode and significantly improve the accuracy of the circuit simulation.Type: GrantFiled: January 5, 2016Date of Patent: September 11, 2018Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Patent number: 9970981Abstract: A semiconductor structure includes a semiconductor device that includes an active region having a semiconductor fin and a gate structure across the semiconductor fin. The gate structure includes a gate electrode. The semiconductor structure also includes a gate line extending from the gate electrode and a metal wiring that is positioned above the gate line and is electrically connected to the gate line through two or more nodes. The semiconductor structure also includes a first measuring electrode and a second measuring electrode coupled respectively to two ends of the metal wiring, the first measuring electrode disposed closer to the gate electrode than the second measuring electrode. The semiconductor structure is configured to measure the temperature of the semiconductor device. During temperature measurement, the first measurement electrode is coupled to a first potential and the second measurement electrode is coupled to a second potential that is lower than the first potential.Type: GrantFiled: July 12, 2017Date of Patent: May 15, 2018Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Junhong Feng, Zhenghao Gan
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Publication number: 20180095122Abstract: A method for testing inter-layer connections is presented. The method entails: providing a test semiconductor device, wherein the test semiconductor device comprises a two-port resistance network; measuring base input resistances on at least one of the first and the second ports of the test semiconductor device for different numbers of resistance links in a defect-free circumstance; obtaining a correspondence relationship between the number of resistance links and the base input resistances; measuring actual input resistances on at least one of the first and the second ports of the test semiconductor device; and determining a position of the resistance link corresponding to the actual input resistances based on the correspondence relationship, wherein the position of the resistance link determines the location of a defect. This method can promptly locate a defect in inter-layer components and can reduce test time and simplify test procedures.Type: ApplicationFiled: September 19, 2017Publication date: April 5, 2018Inventor: Zhenghao GAN
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Publication number: 20180038742Abstract: A semiconductor structure includes a semiconductor device that includes an active region having a semiconductor fin and a gate structure across the semiconductor fin. The gate structure includes a gate electrode. The semiconductor structure also includes a gate line extending from the gate electrode and a metal wiring that is positioned above the gate line and is electrically connected to the gate line through two or more nodes. The semiconductor structure also includes a first measuring electrode and a second measuring electrode coupled respectively to two ends of the metal wiring, the first measuring electrode disposed closer to the gate electrode than the second measuring electrode. The semiconductor structure is configured to measure the temperature of the semiconductor device. During temperature measurement, the first measurement electrode is coupled to a first potential and the second measurement electrode is coupled to a second potential that is lower than the first potential.Type: ApplicationFiled: July 12, 2017Publication date: February 8, 2018Inventors: JUNHONG FENG, ZHENGHAO GAN
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Patent number: 9679889Abstract: A method of manufacturing a semiconductor device is provided. The method includes providing a substrate; forming a well region on the substrate; forming at least one first gate structure on the well region, wherein the first gate structure includes a gate insulating layer and a first gate electrode formed on the gate insulating layer, wherein the first gate electrode is formed having a first enclosed pattern on a surface of the well region; wherein an area inside the first enclosed pattern is defined as a first region, and an area outside the first enclosed pattern is defined as a second region; performing ion implantation on the first region such that the first region has a first conductivity type, and performing ion implantation on the second region such that the second region has a second conductivity type, wherein the first conductivity type and the second conductivity type are different.Type: GrantFiled: September 9, 2016Date of Patent: June 13, 2017Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventor: Zhenghao Gan
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Patent number: 9637834Abstract: A method for fabricating an electrically programmable fuse structure is provided. The method includes providing a substrate. The method also includes forming an anode and a cathode on the substrate. Further, the method includes forming a fuse between the anode and the cathode and having an anode-connecting-end connecting with the anode and a cathode-connecting-end connecting with the cathode over the substrate. Further, the method also includes forming a compressive stress region in the cathode-connecting-end, wherein the anode-connecting-end has a tensile stress region.Type: GrantFiled: December 10, 2015Date of Patent: May 2, 2017Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Publication number: 20170005082Abstract: A method of manufacturing a semiconductor device is provided. The method includes providing a substrate; forming a well region on the substrate; forming at least one first gate structure on the well region, wherein the first gate structure includes a gate insulating layer and a first gate electrode formed on the gate insulating layer, wherein the first gate electrode is formed having a first enclosed pattern on a surface of the well region; wherein an area inside the first enclosed pattern is defined as a first region, and an area outside the first enclosed pattern is defined as a second region; performing ion implantation on the first region such that the first region has a first conductivity type, and performing ion implantation on the second region such that the second region has a second conductivity type, wherein the first conductivity type and the second conductivity type are different.Type: ApplicationFiled: September 9, 2016Publication date: January 5, 2017Inventor: Zhenghao GAN
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Patent number: 9508717Abstract: The present disclosure provides integrated circuit (IC) devices and repair methods of the IC devices. An IC device includes a PMOS transistor including a substrate, a gate dielectric layer on the substrate, and a gate on the gate dielectric layer. The IC device also includes a repair circuit configured to apply a negative bias voltage to the substrate of the PMOS transistor, when the PMOS transistor is in an OFF state, to cause injections of electrons in the substrate into the gate dielectric layer to neutralize holes caused by negative bias temperature instability (NBTI) effect. The repair circuit is further configured to stop applying the negative bias voltage to the substrate of the PMOS transistor when the PMOS transistor is in an ON state. As such, the disclosed IC device repairs defect caused by NBTI effect in the PMOS transistor and prolongs the lifespan of the PMOS transistor.Type: GrantFiled: July 11, 2015Date of Patent: November 29, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Patent number: 9502422Abstract: A semiconductor device includes an insulating layer on a semiconductor substrate, a bit line including TiAl and disposed on the insulating layer, a sidewall layer disposed on opposite sides of the bit line, a word line including TiN and disposed on the sidewall layer intersecting the bit line, and an air gap in an intersection region of the bit line and the word line. The thickness of the sidewall layer is larger than the thickness of the bit line. By having the TiAl bit line and TiN word line, the uniformity of the bit line and word line can be easily controlled to improve the performance of the semiconductor device.Type: GrantFiled: May 17, 2016Date of Patent: November 22, 2016Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventor: Zhenghao Gan
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Patent number: 9455318Abstract: A method of manufacturing a semiconductor device is provided. The method includes providing a substrate; forming a well region on the substrate; forming at least one first gate structure on the well region, wherein the first gate structure includes a gate insulating layer and a first gate electrode formed on the gate insulating layer, wherein the first gate electrode is formed having a first enclosed pattern on a surface of the well region; wherein an area inside the first enclosed pattern is defined as a first region, and an area outside the first enclosed pattern is defined as a second region; performing ion implantation on the first region such that the first region has a first conductivity type, and performing ion implantation on the second region such that the second region has a second conductivity type, wherein the first conductivity type and the second conductivity type are different.Type: GrantFiled: March 18, 2015Date of Patent: September 27, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Zhenghao Gan
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Publication number: 20160260717Abstract: A semiconductor device includes an insulating layer on a semiconductor substrate, a bit line including TiAl and disposed on the insulating layer, a sidewall layer disposed on opposite sides of the bit line, a word line including TiN and disposed on the sidewall layer intersecting the bit line, and an air gap in an intersection region of the bit line and the word line. The thickness of the sidewall layer is larger than the thickness of the bit line. By having the TiAl bit line and TiN word line, the uniformity of the bit line and word line can be easily controlled to improve the performance of the semiconductor device.Type: ApplicationFiled: May 17, 2016Publication date: September 8, 2016Inventor: ZHENGHAO GAN
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Publication number: 20160225757Abstract: An electrostatic discharge protection structure includes a laterally diffused metal oxide semiconductor (LDMOS) device. The LDMOS device includes an embedded bipolar junction transistor. A gate, a source, a buried layer lead-out area, and a substrate lead-out area of the LDMOS device are grounded. A drain and a body region lead-out area of the LDMOS device are electrically connected to a pad input/output terminal. In an embodiment, the embedded bipolar junction transistor includes a PNP transistor operative to transmit a reverse electrostatic discharge current. An N+ drain, a gate, an N+ source, and a P+ substrate lead-out area form a grounded-gate NMOS (GGNMOS) operative to transmit a forward electrostatic discharge current.Type: ApplicationFiled: January 28, 2016Publication date: August 4, 2016Inventor: Zhenghao GAN
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Publication number: 20160203250Abstract: A circuit model of a Zener diode includes a forward bias diode, a reverse bias diode, a first resistor, a second resistor, and a voltage source. The forward bias diode and the first resistor are connected in series and form a first branch disposed between a positive terminal and a negative terminal. The voltage source, the reverse bias diode and the second resistor are connected in series and form a second branch, which is disposed between the positive terminal and the negative terminal and connected in parallel with the first branch. The circuit model can specifically describe the current-voltage characteristics of the Zener diode and significantly improve the accuracy of the circuit simulation.Type: ApplicationFiled: January 5, 2016Publication date: July 14, 2016Inventor: ZHENGHAO GAN
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Publication number: 20160196946Abstract: A method for fabricating an electrically programmable fuse structure is provided. The method includes providing a substrate. The method also includes forming an anode and a cathode on the substrate. Further, the method includes forming a fuse between the anode and the cathode and having an anode-connecting-end connecting with the anode and a cathode-connecting-end connecting with the cathode over the substrate. Further, the method also includes forming a compressive stress region in the cathode-connecting-end, wherein the anode-connecting-end has a tensile stress region.Type: ApplicationFiled: December 10, 2015Publication date: July 7, 2016Inventor: ZHENGHAO GAN