Patents by Inventor Zheng-Long CHEN

Zheng-Long CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047575
    Abstract: A semiconductor device includes a substrate, a deep well, a doped region, a gate, and source and drain regions. The deep well is of a first conductivity type in the substrate. The doped region is in the deep well with an impurity of a second conductivity type. The field oxide is over the deep well and has a side interfaced with the doped region. The gate is over the field oxide. The source and drain regions are over the substrate and laterally separated at least in part by the doped region and the field oxide.
    Type: Application
    Filed: October 18, 2023
    Publication date: February 8, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Patent number: 11837659
    Abstract: An integrated circuit includes a drift region in a substrate, a drain in the substrate which includes a doped drain well, the doped drain well including a first zone, having a first concentration of a first dopant, and a second zone, having a second concentration of the first dopant, where the first concentration is smaller than the second concentration, and a gate electrode over the drift region and being separated from the doped drain well in a direction parallel to a top surface of the substrate by a distance greater than 0.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: December 5, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY, LIMITED
    Inventor: Zheng Long Chen
  • Patent number: 11824115
    Abstract: A semiconductor device includes a semiconductor substrate, a deep n-well, a field oxide, a gate structure, a p-type doped region, a source region, and a drain region. The deep n-well is in the semiconductor substrate. The field oxide is partially embedded in the deep n-well and having a tip corner in a position substantially level with a top surface of the semiconductor substrate. The gate structure is on the field oxide and laterally extends past the tip corner of the field oxide. The p-type doped region is in the deep n-well and is interfaced with the tip corner of the field oxide. The source region and a drain region are laterally separated at least in part by the p-type doped region and the field oxide.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: November 21, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Publication number: 20230352305
    Abstract: A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.
    Type: Application
    Filed: July 12, 2023
    Publication date: November 2, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Patent number: 11742207
    Abstract: A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: August 29, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Patent number: 11699752
    Abstract: A semiconductor device includes a first semiconductor region having a first conductivity type and a second semiconductor region having a second conductivity type, a source region and a body contact region in the second semiconductor region. The semiconductor device also includes a channel region, in the second semiconductor region, located laterally between the source region and the first semiconductor region, a gate dielectric layer overlying both the channel region and a portion of the first semiconductor region, and a gate electrode overlying the gate dielectric layer. The semiconductor device further includes a conformal conductive layer covering an upper surface of the body contact region and a side surface of the source region.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: July 11, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY, LIMITED
    Inventor: Zheng Long Chen
  • Publication number: 20230207694
    Abstract: A semiconductor device includes a substrate, a first well region in the substrate, a gate structure over the substrate, a second well region and a third well region in the substrate and under the gate structure, and a source region and a drain region on opposite sides of the gate structure. The drain region is in the second well region and the source region is in the third well region. The drain region has a first doped region and a second doped region, and the first doped region and the second doped region have different conductivity types.
    Type: Application
    Filed: March 14, 2022
    Publication date: June 29, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC China Company Limited
    Inventors: Hang FAN, Feng HAN, Zheng Long CHEN, Jian-Hua LU
  • Publication number: 20230056697
    Abstract: A method includes forming a dielectric layer on a substrate; forming a first spiral electrode, a second spiral electrode, and a spiral common electrode in the dielectric layer, the first spiral electrode extending in a first spiral path, the second spiral electrode extending in a second spiral path, and the spiral common electrode extending in a third spiral path laterally between the first and second spiral paths.
    Type: Application
    Filed: October 28, 2022
    Publication date: February 23, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Publication number: 20220384640
    Abstract: A method of manufacturing a semiconductor device includes forming a gate electrode overlying a gate dielectric layer covering both a channel region in a second semiconductor region and a portion of a first semiconductor region. First-type dopants are implemented into the second semiconductor region masked by a hard mask to form a source precursor region. The method also includes forming a spacer which overlies the source precursor region and has a first side laterally adjacent to the gate electrode, and recessing a surface region in the source precursor region masked by the spacer to form a source region. The method still includes implanting second-type dopants through the surface region masked at least by the spacer to form a body contact region, and forming a conformal conductive layer covering an upper surface of the body contact region and a side surface of the source.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventor: Zheng Long CHEN
  • Publication number: 20220384646
    Abstract: A method of making an integrated circuit includes forming a drift region in a substrate, the drift region having a first dopant type; forming a drain well in the drift region, the drain well having the first dopant type. The drain well includes a first zone with a first concentration of the first dopant and a second zone having a second concentration of the first dopant different from the first concentration of the first dopant. The method further includes forming a source well in the substrate, the source well having a second dopant type opposite from the first dopant type, the source well being adjacent to the drift region in the substrate. The method includes forming a gate electrode over a top surface of the substrate over the drift region and the source well, and being laterally separated from the drain well. The method includes forming a drain low-density doped (LDD) region in the second zone of the drain well.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventor: Zheng Long CHEN
  • Patent number: 11489039
    Abstract: A semiconductor device includes a capacitor. The capacitor includes a first electrode and a second electrode disposed in a first metal layer. The first electrode has a first end and a second end, and the first electrode has a spiral pattern extending outwards from the first end to the second end. The first electrode and the second electrode have a substantially equal spacing therebetween.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: November 1, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Publication number: 20220231166
    Abstract: A semiconductor device includes a semiconductor substrate, a deep n-well, a field oxide, a gate structure, a p-type doped region, a source region, and a drain region. The deep n-well is in the semiconductor substrate. The field oxide is partially embedded in the deep n-well and having a tip corner in a position substantially level with a top surface of the semiconductor substrate. The gate structure is on the field oxide and laterally extends past the tip corner of the field oxide. The p-type doped region is in the deep n-well and is interfaced with the tip corner of the field oxide. The source region and a drain region are laterally separated at least in part by the p-type doped region and the field oxide.
    Type: Application
    Filed: April 8, 2022
    Publication date: July 21, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Patent number: 11362198
    Abstract: A method of forming a semiconductor structure including: forming a drift well in a substrate, in which the drift well includes first dopants having a first conductivity type; forming an isolation structure over the drift well; forming a well region in the drift well and spaced apart from the isolation structure, such that a top portion of the drift well is between the well region and the isolation structure; doping the top portion with second dopants having a second conductivity type different from the first conductivity type, such that a doping concentration of the second dopants in the top portion is lower than a doping concentration of the first dopants in the top portion after doping the top portion; and forming a gate structure extending from the isolation structure to the well region and covering the top portion of the drift well.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: June 14, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Publication number: 20220165573
    Abstract: A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.
    Type: Application
    Filed: February 7, 2022
    Publication date: May 26, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Publication number: 20220115534
    Abstract: A semiconductor device includes a first semiconductor region having a first conductivity type and a second semiconductor region having a second conductivity type, a source region and a body contact region in the second semiconductor region. The semiconductor device also includes a channel region, in the second semiconductor region, located laterally between the source region and the first semiconductor region, a gate dielectric layer overlying both the channel region and a portion of the first semiconductor region, and a gate electrode overlying the gate dielectric layer. The semiconductor device further includes a conformal conductive layer covering an upper surface of the body contact region and a side surface of the source region.
    Type: Application
    Filed: February 2, 2021
    Publication date: April 14, 2022
    Inventor: Zheng Long CHEN
  • Publication number: 20220115536
    Abstract: An integrated circuit includes a drift region in a substrate, a drain in the substrate which includes a doped drain well, the doped drain well including a first zone, having a first concentration of a first dopant, and a second zone, having a second concentration of the first dopant, where the first concentration is smaller than the second concentration, and a gate electrode over the drift region and being separated from the doped drain well in a direction parallel to a top surface of the substrate by a distance greater than 0.
    Type: Application
    Filed: February 2, 2021
    Publication date: April 14, 2022
    Inventor: Zheng Long CHEN
  • Patent number: 11302809
    Abstract: A method includes forming a first-type deep well with a first impurity of a first conductivity type in a semiconductor substrate; doping a second impurity of a second conductivity type into the first-type deep well to form a second-type doped region, in which a concentration of the first impurity in the first-type deep well is greater than a concentration of the second impurity in the second-type doped region and less than about ten times the concentration of the second impurity in the second-type doped region; forming a field oxide partially embedded in the semiconductor substrate, the field oxide laterally extending from a first side of the second-type doped region; forming a second-type well of the second conductivity type in the first-type deep well and on a second side of the second-type doped region opposite the first side of the second-type doped region.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: April 12, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Publication number: 20220059692
    Abstract: A method includes forming a first-type deep well with a first impurity of a first conductivity type in a semiconductor substrate; doping a second impurity of a second conductivity type into the first-type deep well to form a second-type doped region, in which a concentration of the first impurity in the first-type deep well is greater than a concentration of the second impurity in the second-type doped region and less than about ten times the concentration of the second impurity in the second-type doped region; forming a field oxide partially embedded in the semiconductor substrate, the field oxide laterally extending from a first side of the second-type doped region; forming a second-type well of the second conductivity type in the first-type deep well and on a second side of the second-type doped region opposite the first side of the second-type doped region.
    Type: Application
    Filed: September 3, 2020
    Publication date: February 24, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Patent number: 11244830
    Abstract: A method includes forming a hard mask over an epitaxy layer of a substrate; forming a patterned mask over the hard mask; etching the hard mask and the epitaxy layer to form a trench in the epitaxy layer, in which a remaining portion of the hard mask covers a topmost surface of the epitaxy layer, and the trench exposes a sidewall of the epitaxy layer; forming a P-well region by directing p-type ion beams into the trench along an oblique direction that is non-parallel to a normal line of the topmost surface of the epitaxy layer, in which the topmost surface of the epitaxy layer is protected from the p-type ion beams by the remaining portion of the hard mask during directing the p-type ion beams into the trench; and after directing the p-type ion beams into the trench, forming a gate structure in the trench.
    Type: Grant
    Filed: April 27, 2020
    Date of Patent: February 8, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Publication number: 20220005949
    Abstract: A method of forming a semiconductor structure including: forming a drift well in a substrate, in which the drift well includes first dopants having a first conductivity type; forming an isolation structure over the drift well; forming a well region in the drift well and spaced apart from the isolation structure, such that a top portion of the drift well is between the well region and the isolation structure; doping the top portion with second dopants having a second conductivity type different from the first conductivity type, such that a doping concentration of the second dopants in the top potion is lower than a doping concentration of the first dopants in the top portion after doping the top portion; and forming a gate structure extending from the isolation structure to the well region and covering the top portion of the drift well.
    Type: Application
    Filed: July 20, 2020
    Publication date: January 6, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN