Patents by Inventor Zheng-Zong Twu

Zheng-Zong Twu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pedestal/heater assembly lift mechanism with direct drive lead screw
    Publication number: 20040179933
    Abstract: A new and improved lift mechanism which is suitably adapted for raising and lowering a pedestal/heater assembly inside a processing chamber for semiconductor wafer substrates. The pedestal/heater assembly lift mechanism includes a drive motor which is directly coupled through a shaft coupling to a threaded lead screw for rotating the lead screw in the clockwise or counterclockwise direction. The lead screw threadibly engages the pedestal/heater assembly for selectively raising and lowering the pedestal/heater assembly inside the processing chamber.
    Type: Application
    Filed: March 11, 2003
    Publication date: September 16, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Hsi Huang, Chang-Yi Hsieh, Yang-Hai Fan, Shih-Chang Hsu, Hao-Quan Yu, Zheng-Zong Twu