Patents by Inventor ZHENG ZUO
ZHENG ZUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250080074Abstract: Disclosed are a filter production method and a filter, which relate to the technical field of wireless communication. In the above, the filter production method includes: providing a substrate structure; producing and forming a line structure on at least one side of the substrate structure, wherein the line structure includes at least one line layer, and at least one of the line layers has at least one inductor element; and producing and forming a capacitor structure and/or a resonator structure on the side of the at least one line layer close to the substrate structure and/or away from the substrate structure, wherein the capacitor structure includes at least one capacitor element, and the resonator structure includes at least one acoustic resonator. On the basis of the above method, the problem of relatively large integrated size existing in filters produced according to the prior art can be improved.Type: ApplicationFiled: October 26, 2021Publication date: March 6, 2025Inventors: Wei CHENG, Chengjie ZUO, Peng WANG, Zheng WANG
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Patent number: 12125924Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: GrantFiled: June 16, 2023Date of Patent: October 22, 2024Inventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20230411534Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: ApplicationFiled: June 16, 2023Publication date: December 21, 2023Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Patent number: 11728439Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: GrantFiled: April 20, 2021Date of Patent: August 15, 2023Inventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Patent number: 11380757Abstract: In one aspect, a semiconductor device may include a semiconductor substrate formed of silicon carbide; and an edge termination having a first metal layer and a second metal layer, wherein the first metal layer is deposited and patterned spacedly on the semiconductor substrate and the second metal layer is deposited and patterned onto at least a portion of the spaced first metal layer and onto the semiconductor substrate between said spaced first metal layer, and wherein the first metal layer comprises a high work function metal, while the second metal layer comprises a low work function metal. In one embodiment, the high work function metal includes Silver, Aluminum, Chromium, Nickel, and Gold; and the low work function metal includes Titanium and Nickel Silicide.Type: GrantFiled: December 10, 2020Date of Patent: July 5, 2022Inventors: Zheng Zuo, Ruigang Li, Da Teng
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Publication number: 20220181443Abstract: A semiconductor device comprising a substrate having a first conductivity type; an epitaxial layer having the first conductivity type deposited on the substrate; and a MOS structure formed on the epitaxial layer; said MOS structure including multiple well regions with a second conductivity type; multiple source regions with highly doped first conductivity type formed in the well regions; multiple highly doped regions of the second conductivity type formed in the well regions; an insulating gate oxide layer formed on top of the epitaxial layer and spanned adjacent wells and source regions; and a gate electrode formed above the gate oxide layer and spanned adjacent wells and source regions, wherein a JFET region is formed between two adjacent wells; and one or more central implant regions are added with the second conductivity type on a surface of the JFET region to reduce an electric field in the gate oxide.Type: ApplicationFiled: December 8, 2021Publication date: June 9, 2022Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210328076Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: ApplicationFiled: April 20, 2021Publication date: October 21, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210328077Abstract: A semiconductor device may include a substrate having a first conductivity type; an epitaxial layer having the first conductivity type deposited on one side of the substrate; a plurality of regions having a second conductivity type formed under a top surface of the epitaxial layer; a first Ohmic metal patterned and deposited on top of the regions with the second conductivity type; a Schottky contact metal deposited on top of the entire epitaxial layer to form a Schottky junction; and a second Ohmic metal deposited on a backside of the substrate, wherein the regions include one or more wide regions, each having different widths that can be optimized to simultaneously obtain high surge current capability and preserve a low forward voltage drop and reverse leakage current.Type: ApplicationFiled: April 20, 2021Publication date: October 21, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210328078Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: ApplicationFiled: April 20, 2021Publication date: October 21, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210218348Abstract: In one aspect, a power converter may include a plurality of inductor banks; a plurality of switches, each switch has a first power node and a second power node, and one control node that receives a control signal that maintains the switch in either ON state in which the circuit path between the first node and the second node are established, or OFF state in which the circuit path between the first node and the second node are eliminated; and a control logic that generates multiple signals that are applied to the control nodes of the switches. In one embodiment, the switches are MOSFETs; the first power nodes are drains and the second power nodes are sources, and the control nodes are gates.Type: ApplicationFiled: January 15, 2021Publication date: July 15, 2021Applicant: AZ Power, IncInventors: Yanchao Li, Ruigang Li, Zheng Zuo
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Publication number: 20210218346Abstract: In one aspect, a power converter may include a plurality of inductor banks; a plurality of capacitor banks; an intermediate bus capacitor bank; a plurality of switches, each switch has a first power node and a second power node, and one control node that receives a control signal that maintains the switch in either ON state in which the circuit path between the first node and the second node are established, or OFF state in which the circuit path between the first node and the second node are eliminated; and a control logic that generates a plurality of signal combinations that are applied to the control nodes of said plurality of switches to enable the power converter to have a smooth voltage output and enhanced tolerance for a low voltage input bus for all signal combinations.Type: ApplicationFiled: January 15, 2021Publication date: July 15, 2021Applicant: AZ Power, IncInventors: Yanchao Li, Ruigang Li, Zheng Zuo
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Publication number: 20210218341Abstract: A power converter may include a plurality of inductor banks; a plurality of capacitor banks; a plurality of switches, each switch having two power nodes and one control node that receives a control signal that maintains the switch in either ON state in which the circuit path between the first node and the second node are established, or OFF state in which the circuit path between the first node and the second node are eliminated; and a control logic that generates multiple signal combinations that are applied to the control nodes of the switches so that for each signal combination the power converter is configured to generate different voltage outputs. In one embodiment, the control logic generates control signals to cause zero current switching on each switch.Type: ApplicationFiled: January 15, 2021Publication date: July 15, 2021Applicant: AZ Power, IncInventors: Yanchao Li, Ruigang Li, Zheng Zuo
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Publication number: 20210218344Abstract: A power converter may include a plurality of inductor banks; a plurality of capacitor banks; an intermediate bus capacitor bank; a plurality of switches, each switch has a first power node, a second power node and one control nodes that receives a control signal that maintains the switch in either ON state in which the circuit path between the first power node and the second power node are established, or OFF state in which the circuit path between the first power node and the second power node are eliminated, and a control logic that generates a plurality of signal combinations that are applied to the control nodes of said plurality of switches to enable the power converter to have a smooth voltage output and enhanced tolerance for a low voltage input bus for all signal combinations.Type: ApplicationFiled: January 15, 2021Publication date: July 15, 2021Applicant: AZ Power, IncInventors: Yanchao Li, Ruigang Li, Zheng Zuo
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Publication number: 20210098579Abstract: A method for manufacturing a Silicon Carbide (SiC) Schottky diode may include steps of providing a substrate; forming a first epitaxial layer with a first conductivity type on top of the substrate; forming a second epitaxial layer with a second conductivity type on top of the first epitaxial layer; forming a third epitaxial layer with the second conductivity type on top of the second epitaxial layer; patterning and etching the second and third epitaxial layers to form a plurality of trenches; depositing a first ohmic contact metal on a backside of the substrate; forming a second ohmic contact metal on top of the second epitaxial layer; forming a Schottky contact metal at a bottom portion of each trench; and forming a pad electrode on top of the Schottky contact metal.Type: ApplicationFiled: December 10, 2020Publication date: April 1, 2021Applicant: AZ Power, IncInventors: NA REN, ZHENG ZUO, RUIGANG LI
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Publication number: 20210091177Abstract: In one aspect, a semiconductor device may include a semiconductor substrate formed of silicon carbide; and an edge termination having a first metal layer and a second metal layer, wherein the first metal layer is deposited and patterned spacedly on the semiconductor substrate and the second metal layer is deposited and patterned onto at least a portion of the spaced first metal layer and onto the semiconductor substrate between said spaced first metal layer, and wherein the first metal layer comprises a high work function metal, while the second metal layer comprises a low work function metal. In one embodiment, the high work function metal includes Silver, Aluminum, Chromium, Nickel, and Gold; and the low work function metal includes Titanium and Nickel Silicide.Type: ApplicationFiled: December 10, 2020Publication date: March 25, 2021Applicant: AZ Power, IncInventors: ZHENG ZUO, RUIGANG LI, DA TENG
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Publication number: 20210036165Abstract: In one aspect, a merged PiN Schottky (MPS) diode may include a silicon carbide substrate having a first conductivity type. The epitaxial layer with a first conductivity type was formed on the substrate, which has doping concentration lower than the substrate. A plurality of regions having the second conductivity type different from the first conductivity type are formed under the surface of the epitaxial layer. The Ohmic contact metal is formed on the region of the second conductivity type. The Schottky contact metal is placed on top of the entire epitaxial layer to form a Schottky junction. The Ohmic contact was formed by a cathode electrode on the back side of the substrate.Type: ApplicationFiled: August 1, 2020Publication date: February 4, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210036167Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; forming a plasma spreading layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: ApplicationFiled: August 1, 2020Publication date: February 4, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210036166Abstract: A method for manufacturing a merged PiN Schottky (MPS) diode may include steps of providing a substrate having a first conductivity type; forming an epitaxial layer with the first conductivity type on top of the substrate; forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer; depositing and patterning a first Ohmic contact metal on the regions with the second conductivity type; depositing a Schottky contact metal on top of the entire epitaxial layer; and forming a second Ohmic contact metal on a backside of the substrate. In another embodiment, the step of forming a plurality of regions with a second conductivity type under a top surface of the epitaxial layer may include steps of depositing and patterning a mask layer on the epitaxial layer, implanting P-type dopant into the epitaxial layer, and removing the mask layer.Type: ApplicationFiled: August 1, 2020Publication date: February 4, 2021Applicant: AZ Power, IncInventors: Xiaotian Yu, Zheng Zuo, Ruigang Li
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Publication number: 20210028167Abstract: In one aspect, a method for manufacturing an analog integrated circuit with improved transistor lifetime includes steps of: providing a P-type substrate; forming N+ source/drain regions; forming a P+ isolation island to separate a high voltage I/O transistor and low voltage core transistor; patterning a SiON dielectric layer on one side of the P+ isolation island for the high voltage I/O transistor; patterning a SiO2 dielectric layer on the other side of the P+ isolation island for the low voltage core transistor; forming a gate structure for the low voltage core transistor and high voltage I/O transistor; forming a gate polysilicon layer on a top portion of each of the SiO2 and SiON dielectric layers; forming a SiON passivation layer with open holes; and forming a source electrode, a gate electrode and a drain electrode for each of the low voltage core transistor and high voltage I/O transistor.Type: ApplicationFiled: May 9, 2020Publication date: January 28, 2021Applicant: AZ Power, IncInventors: ZHENG ZUO, NA REN, RUIGANG LI
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Publication number: 20200321477Abstract: A Schottky diode may include a substrate; an epitaxial layer deposited on top of the substrate; one or more trenches formed on top of the epitaxial layer; an implantation region at a bottom portion of each trench; an ohmic contact metal on the other side of the substrate; a first Schottky contact metal deposited onto the implantation region in each trench to form a first Schottky junction between the first Schottky contact metal and the epitaxial layer at a lower trench sidewall; a second Schottky contact metal filling each trench and extending a predetermined length to each corner of mesas on the epitaxial layer to form a second Schottky junction between the second Schottky contact metal and the epitaxial layer at an upper trench sidewall; and a third Schottky contact metal covering the second Schottky contact metal and the epitaxial layer to form a third Schottky junction.Type: ApplicationFiled: July 30, 2019Publication date: October 8, 2020Applicant: AZ Power, IncInventors: NA REN, ZHENG ZUO, RUIGANG LI