Abstract: A method of detecting defects includes: obtaining a gray-scale image of a substrate to be detected; obtaining a gray-scale difference g between different regions in the gray-scale image; calculating an estimated value of a film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g; and determining whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d.

Abstract: The present disclosure relates to a method and apparatus for determining an illumination intensity for inspection, and an method and apparatus optical inspection. The method for determining an illumination intensity for inspection comprises: acquiring images of a sample to be inspected taken by each of at least one imaging element at a plurality of illumination intensities; calculating, for each imaging element, a gray standard deviation of each of the images acquired at the plurality of illumination intensities; and determining the illumination intensity of each imaging element for inspection according to the gray standard deviation. The inspection accuracy may be improved by using the illumination intensity determined by the method provided in the present disclosure to inspect an object to be inspected.

Abstract: A method of detecting defects includes: obtaining a gray-scale image of a substrate to be detected; obtaining a gray-scale difference g between different regions in the gray-scale image; calculating an estimated value of a film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g; and determining whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d.

Abstract: The present disclosure relates to a method and apparatus for determining an illumination intensity for inspection, and an method and apparatus optical inspection. The method for determining an illumination intensity for inspection comprises: acquiring images of a sample to be inspected taken by each of at least one imaging element at a plurality of illumination intensities; calculating, for each imaging element, a gray standard deviation of each of the images acquired at the plurality of illumination intensities; and determining the illumination intensity of each imaging element for inspection according to the gray standard deviation. The inspection accuracy may be improved by using the illumination intensity determined by the method provided in the present disclosure to inspect an object to be inspected.