Patents by Inventor Zhengrong CHEN

Zhengrong CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240030279
    Abstract: The present disclosure provides a semiconductor structure and a method for forming the semiconductor structure. The method includes: providing a substrate including a device region and a guard ring region surrounding the device region; and forming a power device in the device region and forming a guard ring in the guard ring region, wherein the guard ring is doped with a first dopant ion that is formed by a partial doping process used in a formation of the power device, and a conductivity type of the first dopant ion in the guard ring is different from a device type of the power device. Since the guard ring is formed by the necessary doping process used in forming the power device, additional photomask process and doping process for forming the guard ring is omitted, effectively reducing process steps and process costs.
    Type: Application
    Filed: April 24, 2023
    Publication date: January 25, 2024
    Inventors: Zhengrong CHEN, Wensheng Qian, Sitong Chen, Zhaozhao Xu, Wan Song, Donghua Liu, Leping Wei
  • Patent number: 11563103
    Abstract: A method for manufacturing an IGBT device includes: forming a source of the IGBT device in a substrate, wherein the substrate is an MCZ substrate; performing annealing processing on the substrate, wherein a layer of oxide is formed on the surface of the source during an annealing process; forming an interlayer dielectric layer on the substrate, wherein the interlayer dielectric layer is comprised of a silicon nitride layer, a first type oxide layer, and a second type oxide layer, and a material used to form the first type oxide layer is different from a material used to form the second type oxide layer; and performing nitrogen annealing processing on the substrate.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: January 24, 2023
    Assignees: Hua Hong Semiconductor (Wuxi) Limited, Shanghai Huahong Grace Semiconductor Manufacturing Corporation
    Inventors: Chao Feng, Zhengrong Chen, Jia Pan, Tinghui Yao, Yu Jin
  • Publication number: 20220069105
    Abstract: A method for manufacturing an IGBT device includes: forming a source of the IGBT device in a substrate, wherein the substrate is an MCZ substrate; performing annealing processing on the substrate, wherein a layer of oxide is formed on the surface of the source during an annealing process; forming an interlayer dielectric layer on the substrate, wherein the interlayer dielectric layer is comprised of a silicon nitride layer, a first type oxide layer, and a second type oxide layer, and a material used to form the first type oxide layer is different from a material used to form the second type oxide layer; and performing nitrogen annealing processing on the substrate.
    Type: Application
    Filed: April 14, 2021
    Publication date: March 3, 2022
    Applicants: Hua Hong Semiconductor (Wuxi) Limited, SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION
    Inventors: Chao FENG, Zhengrong CHEN, Jia PAN, Tinghui YAO, Yu JIN
  • Publication number: 20220028984
    Abstract: The present application relates to the field of semiconductor forming technologies, in particular to an interlayer dielectric layer structure for a power MOS device and a method for making the same. The interlayer dielectric layer structure for a power MOS device comprises a silicon-rich oxide SiOx film layer deposited on the surface of the power MOS device, wherein a silicon dioxide film layer is deposited on the silicon-rich oxide SiOx film layer. The method for forming an interlayer dielectric layer structure for a power MOS device comprises the following steps: depositing a silicon-rich oxide SiOx film layer on the surface of the power MOS device; and depositing a silicon dioxide film layer on the silicon-rich oxide SiOx film layer.
    Type: Application
    Filed: November 12, 2020
    Publication date: January 27, 2022
    Applicant: Hua Hong Semiconductor (Wuxi) Limited
    Inventors: Xiuyong LIU, Zhengrong CHEN, Changming WU, Jiliang ZHANG, Lipei JIN
  • Patent number: 10943994
    Abstract: A manufacturing method for a shielded gate trench device comprises the following steps: Step 1, forming a gate trench in a first epitaxial layer; Step 2, forming a first dielectric layer and fully filling the gate trench with a first polysilicon layer; Step 3, forming a top trench: Step 31, carrying out primary polysilicon dry-etching; Step 32, carrying out primary dielectric layer wet-etching to decrease the thickness of the first dielectric layer in the top trench; Step 33, carrying out secondary polysilicon dry-etching; Step 34, carrying out secondary dielectric layer wet-etching to remove the rest of the first dielectric layer on a side face of the top trench and to form the top trench; and Step 4, forming a trench gate in the top trench. By adoption of the manufacturing method, the gate-source capacitance and the gate-drain capacitance can be decreased, and thus, the input capacitance is decreased.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: March 9, 2021
    Assignee: Shanhai Huahong Grace Semiconductor Manufacturing Corporation
    Inventors: Yulong Yang, Zhengrong Chen, Haofeng Shen
  • Publication number: 20200295159
    Abstract: A manufacturing method for a shielded gate trench device comprises the following steps: Step 1, forming a gate trench in a first epitaxial layer; Step 2, forming a first dielectric layer and fully filling the gate trench with a first polysilicon layer; Step 3, forming a top trench: Step 31, carrying out primary polysilicon dry-etching; Step 32, carrying out primary dielectric layer wet-etching to decrease the thickness of the first dielectric layer in the top trench; Step 33, carrying out secondary polysilicon dry-etching; Step 34, carrying out secondary dielectric layer wet-etching to remove the rest of the first dielectric layer on a side face of the top trench and to form the top trench; and Step 4, forming a trench gate in the top trench. By adoption of the manufacturing method, the gate-source capacitance and the gate-drain capacitance can be decreased, and thus, the input capacitance is decreased.
    Type: Application
    Filed: December 6, 2019
    Publication date: September 17, 2020
    Applicant: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION
    Inventors: Yulong YANG, Zhengrong CHEN, Haofeng SHEN
  • Patent number: 10505934
    Abstract: A sensitive information processing method, device and server, and a security determination system. The method includes acquiring to-be-processed information in a page; determining whether the to-be-processed information is sensitive information according to a preset sensitive information identification strategy; performing processing according to a preset sensitive information processing strategy when the to-be-processed information is sensitive information, to form processed sensitive information; and substituting the corresponding to-be-processed information in the page with the processed sensitive information, to form a page with the processed sensitive information. By using the example embodiments of the present application, identification and processing for sensitive information in a page returned to a user may be completed on a server terminal, which improves the security of the sensitive information in the page.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: December 10, 2019
    Assignee: Alibaba Group Holding Limited
    Inventors: Xiang Zhang, Jianping Lv, Zhengrong Chen, Ke Yang, Huiqing Xu, Wei Mou, Xingang Wang, Chao Sun, Xiaoxue Yu, Qinfei Jiang, Hanxiao Xiao
  • Publication number: 20170180376
    Abstract: A sensitive information processing method, device and server, and a security determination system. The method includes acquiring to-be-processed information in a page; determining whether the to-be-processed information is sensitive information according to a preset sensitive information identification strategy; performing processing according to a preset sensitive information processing strategy when the to-be-processed information is sensitive information, to form processed sensitive information; and substituting the corresponding to-be-processed information in the page with the processed sensitive information, to form a page with the processed sensitive information. By using the example embodiments of the present application, identification and processing for sensitive information in a page returned to a user may be completed on a server terminal, which improves the security of the sensitive information in the page.
    Type: Application
    Filed: March 2, 2017
    Publication date: June 22, 2017
    Inventors: Xiang Zhang, Jianping LV, Zhengrong Chen, Ke Yang, Huiqing Xu, Wei Mou, Xingang Wang, Chao Sun, Xiaoxue Yu, Qinfei Jiang, Hanxiao Xiao
  • Publication number: 20170033087
    Abstract: A stack semiconductor package structure includes a substrate; a second chip comprising a plurality of conductive bumps formed on a surface thereof; and a first chip positioned on the second chip, wherein the second chip is electrically connected to the substrate through the plurality of conductive bumps in a flip-chip manner, and wherein the first chip is electrically connected to the second chip through a plurality of bonding wires.
    Type: Application
    Filed: July 29, 2016
    Publication date: February 2, 2017
    Inventor: Zhengrong CHEN