Abstract: Methods, systems, and apparatuses for detecting and suppressing analog error in an output stage of a digital class-D amplifier are described. In embodiments, the digital class-D amplifier includes a PWM stage, an output stage, and a feedback circuit. The PWM stage receives the signal difference between an input digital signal and a feedback digital signal, generates a digital pulse-width modulated (PWM) signal based thereon, and provides the digital PWM signal as a first component of the digital feedback signal. The output stage receives the digital PWM signal and generates an analog output signal for driving a load responsive to the digital PWM signal. The feedback circuit combines an analog representation of the PWM signal and the analog output signal to generate a second component of the digital feedback signal.

Abstract: A detection method for a spot image based thin line detection is disclosed. The method includes a step for constructing a band limited spot image from a transmitted and reflected optical image of the mask. The spot image is calibrated to reduce noise introduced by the one or more inspection systems. Based on the band limited spot image, a non-printable feature map is generated for the non-printable features and a printable feature map is generated for the printable features. One or more test images of the mask are analyzed to detect defects on such mask.

Abstract: A detection method for a spot image based thin line detection is disclosed. The method includes a step for generating a band limited spot image from a transmitted and reflected optical image of the mask. The spot image is calibrated to minimize a plurality of optical aberrations from the spot image. The spot image is restored back to a mask image to allow at least one of: a more reliable segmentation between thin line and non-thin line areas on the mask image or a more accurate line width measurement for facilitating segmentation. Thin line features and non-thin lines features are distinguished on the restored mask image. Areas containing thin line features are grown while preventing the thin line growth from encroaching the non-thin line features.

Abstract: A detection method for a spot image based thin line detection is disclosed. The method includes a step for generating a band limited spot image from a transmitted and reflected optical image of the mask. The spot image is calibrated to minimize a plurality of optical aberrations from the spot image. The spot image is restored back to a mask image to allow at least one of: a more reliable segmentation between thin line and non-thin line areas on the mask image or a more accurate line width measurement for facilitating segmentation. Thin line features and non-thin lines features are distinguished on the restored mask image. Areas containing thin line features are grown while preventing the thin line growth from encroaching the non-thin line features.

Abstract: A method and system for providing automatic gain control for a differential amplifier are provided. An impedance network is set to have a first impedance that corresponds to a first gain for a differential amplifier, which amplifies an input signal by the first gain. Once the amplified input signal is greater than a first threshold voltage, the impedance network is set to have a second impedance that corresponds to a second gain for the differential amplifier, which amplifies the input signal. Once amplified input signal is greater than a second threshold voltage and a predetermined period has lapsed, the impedance network is reset to have the first impedance that corresponds to a first gain for the differential amplifier.

Abstract: A clock detector is provided. The clock detector generally comprises a filter, a first branch, a second branch, a latch, and logic. The filter is adapted to receive a clock signal and is coupled to a low threshold inverter in the first branch and a high threshold inverter in the second branch. The latch is adapted to receive the clock signal and is coupled to the first branch, while the logic is coupled to the node between the first branch and the latch, an output of the latch, and the second branch so that it can output a clock detection signal.

Abstract: A method and system for providing automatic gain control for a differential amplifier are provided. An impedance network is set to have a first impedance that corresponds to a first gain for a differential amplifier, which amplifies an input signal by the first gain. Once the amplified input signal is greater than a first threshold voltage, the impedance network is set to have a second impedance that corresponds to a second gain for the differential amplifier, which amplifies the input signal. Once amplified input signal is greater than a second threshold voltage and a predetermined period has lapsed, the impedance network is reset to have the first impedance that corresponds to a first gain for the differential amplifier.

Abstract: A clock detector is provided. The clock detector generally comprises a filter, a first branch, a second branch, a latch, and logic. The filter is adapted to receive a clock signal and is coupled to a low threshold inverter in the first branch and a high threshold inverter in the second branch. The latch is adapted to receive the clock signal and is coupled to the first branch, while the logic is coupled to the node between the first branch and the latch, an output of the latch, and the second branch so that it can output a clock detection signal.

Abstract: A microwave imaging microscope and associated probe, or a read head. The probe or the read head includes a sensor unit with three fixed electrodes, preferably a stimulating electrode surrounding a sensing electrode and isolated by a grounded electrode. Circuitry couples the stimulating electrode to the probe signal variably selected in the range of 100 MHz to 100 GHz and couples the sensing electrode to a signal processor detecting in-phase and out-of-phase components of the current or voltage across the sensing electrode and the grounded electrode. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample. The probe may be formed by semiconductor processing methods on a silicon chip.

Abstract: An analog to digital converter includes an array of differential input amplifiers. Each amplifier inputs an input voltage and a corresponding voltage reference, and outputs a differential signal representing a comparison of the input voltage and the corresponding voltage reference. A plurality of latches stores the differential signal from each of the differential input amplifiers. A decoder converts the stored differential signals to N-bit digital output. A first interface amplifier is connected to a first edge amplifier of the array through a first cross point. A second interface amplifier is connected to a second edge amplifier of the array through a second cross point. The first interface amplifier and the second interface amplifier are connected to each other through a third cross point.

Abstract: A non-resonant microwave imaging microscope and associated probe. The probe includes a sensor unit with two fixed electrodes, preferably a large outer electrode surrounding a small inner electrode which are approximately co-planar, thereby protecting the small inner electrode from an uneven topography. The outer electrode may be deposited on a conically shaped dielectric disk having a bore through which the inner electrode is placed. Non-resonant circuitry couples the inner electrode to the probe signal variably selected in the range of 10 MHz-50 GHz and to an amplifier whose output is coupled to a signal processor detector in-phase and out-of-phase components of the current or voltage across the two electrodes. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample.

Abstract: An analog to digital converter includes an array of differential input amplifiers. Each amplifier inputs an input voltage and a corresponding voltage reference, and outputs a differential signal representing a comparison of the input voltage and the corresponding voltage reference. A plurality of latches stores the differential signal from each of the differential input amplifiers. A decoder converts the stored differential signals to N-bit digital output. A first interface amplifier is connected to a first edge amplifier of the array through a first cross point. A second interface amplifier is connected to a second edge amplifier of the array through a second cross point. The first interface amplifier and the second interface amplifier are connected to each other through a third cross point.

Abstract: A non-resonant microwave imaging microscope and associated probe. The probe includes a sensor unit with two fixed electrodes, preferably a large outer electrode surrounding a small inner electrode which are approximately co-planar, thereby protecting the small inner electrode from an uneven topography. The outer electrode may be deposited on a conically shaped dielectric disk having a bore through which the inner electrode is placed. Non-resonant circuitry couples the inner electrode to the probe signal variably selected in the range of 10 MHz-50 GHz and to an amplifier whose output is coupled to a signal processor detector in-phase and out-of-phase components of the current or voltage across the two electrodes. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample.