Patents by Inventor Zhenqiu Liu
Zhenqiu Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10253368Abstract: Described herein are gene signatures providing prognostic, diagnostic, treatment and molecular subtype classifications of ovarian cancers through generation of ovarian cancer disease signatures (OCDSs) that account for molecular heterogeneity present in gynecological cancers. An ovarian cancer fixed signature (OCFS) is described which relates to the core programming of disease development, in addition to an ovarian cancer stem cell (OCSC) signature. Development various disease signature, suggests personalized treatment strategies focused on molecular subtypes of gynecological cancers, such as triage tests for patients.Type: GrantFiled: April 17, 2015Date of Patent: April 9, 2019Assignee: Cedars-Sinai Medical CenterInventors: Sandra Orsulic, Beth Y. Karlan, Xiaojiang Cui, Mourad Tighiouart, Dong-Joo Cheon, Zhenqiu Liu
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Patent number: 9714474Abstract: A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece.Type: GrantFiled: April 6, 2010Date of Patent: July 25, 2017Assignee: TEL NEXX, INC.Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
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Patent number: 9453290Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.Type: GrantFiled: August 15, 2013Date of Patent: September 27, 2016Assignee: TEL NEXX, INC.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20150322530Abstract: Described herein are gene signatures providing prognostic, diagnostic, treatment and molecular subtype classifications of ovarian cancers through generation of ovarian cancer disease signatures (OCDSs) that account for molecular heterogeneity present in gynecological cancers. An ovarian cancer fixed signature (OCFS) is described which relates to the core programming of disease development, in addition to an ovarian cancer stem cell (OCSC) signature. Development various disease signature, suggests personalized treatment strategies focused on molecular subtypes of gynecological cancers, such as triage tests for patients.Type: ApplicationFiled: April 17, 2015Publication date: November 12, 2015Applicant: CEDARS-SINAI MEDICAL CENTERInventors: Sandra Orsulic, Beth Y. Karlan, Xiaojiang Cui, Mourad Tighiouart, Dong-Joo Cheon, Zhenqiu Liu
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Publication number: 20130334036Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.Type: ApplicationFiled: August 15, 2013Publication date: December 19, 2013Applicant: TEL NEXX, INC.Inventors: Arthur KEIGLER, John HARRELL, Zhenqiu LIU, Qunwei WU
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Patent number: 8512543Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.Type: GrantFiled: December 9, 2010Date of Patent: August 20, 2013Assignee: Tel Nexx, Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20120325671Abstract: A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.Type: ApplicationFiled: December 17, 2010Publication date: December 27, 2012Applicant: TEL NEXX, Inc.Inventors: Arthur Keigler, Zhenqiu Liu, Zhongqin Zhang
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Patent number: 8277624Abstract: A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.Type: GrantFiled: October 17, 2011Date of Patent: October 2, 2012Assignee: Tel Nexx, Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20120152752Abstract: A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.Type: ApplicationFiled: December 17, 2010Publication date: June 21, 2012Applicant: Nexx Systems, Inc.Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
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Publication number: 20120103799Abstract: A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.Type: ApplicationFiled: October 17, 2011Publication date: May 3, 2012Applicant: Nexx Systems Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Patent number: 8168057Abstract: A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.Type: GrantFiled: May 28, 2010Date of Patent: May 1, 2012Assignee: NEXX Systems, Inc.Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
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Patent number: 8038856Abstract: A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.Type: GrantFiled: May 24, 2010Date of Patent: October 18, 2011Assignee: NEXX Systems, Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20110240481Abstract: A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece.Type: ApplicationFiled: April 6, 2010Publication date: October 6, 2011Applicant: NEXX Systems, Inc.Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
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Publication number: 20110139627Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.Type: ApplicationFiled: December 9, 2010Publication date: June 16, 2011Applicant: NEXX SYSTEMS, INC.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20100301564Abstract: A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.Type: ApplicationFiled: May 28, 2010Publication date: December 2, 2010Applicant: NEXX SYSTEMS, INC.Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
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Publication number: 20100295225Abstract: A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.Type: ApplicationFiled: May 24, 2010Publication date: November 25, 2010Applicant: NEXX SYSTEMS INC.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Patent number: 7727366Abstract: A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.Type: GrantFiled: November 2, 2005Date of Patent: June 1, 2010Assignee: NEXX Systems, Inc.Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
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Patent number: 7722747Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.Type: GrantFiled: October 22, 2004Date of Patent: May 25, 2010Assignee: NEXX Systems, Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Patent number: 7445697Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.Type: GrantFiled: October 22, 2004Date of Patent: November 4, 2008Assignee: NEXX Systems, Inc.Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
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Publication number: 20060110536Abstract: A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.Type: ApplicationFiled: November 2, 2005Publication date: May 25, 2006Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell