Patents by Inventor Zhenqiu Liu

Zhenqiu Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10253368
    Abstract: Described herein are gene signatures providing prognostic, diagnostic, treatment and molecular subtype classifications of ovarian cancers through generation of ovarian cancer disease signatures (OCDSs) that account for molecular heterogeneity present in gynecological cancers. An ovarian cancer fixed signature (OCFS) is described which relates to the core programming of disease development, in addition to an ovarian cancer stem cell (OCSC) signature. Development various disease signature, suggests personalized treatment strategies focused on molecular subtypes of gynecological cancers, such as triage tests for patients.
    Type: Grant
    Filed: April 17, 2015
    Date of Patent: April 9, 2019
    Assignee: Cedars-Sinai Medical Center
    Inventors: Sandra Orsulic, Beth Y. Karlan, Xiaojiang Cui, Mourad Tighiouart, Dong-Joo Cheon, Zhenqiu Liu
  • Patent number: 9714474
    Abstract: A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece.
    Type: Grant
    Filed: April 6, 2010
    Date of Patent: July 25, 2017
    Assignee: TEL NEXX, INC.
    Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
  • Patent number: 9453290
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: September 27, 2016
    Assignee: TEL NEXX, INC.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20150322530
    Abstract: Described herein are gene signatures providing prognostic, diagnostic, treatment and molecular subtype classifications of ovarian cancers through generation of ovarian cancer disease signatures (OCDSs) that account for molecular heterogeneity present in gynecological cancers. An ovarian cancer fixed signature (OCFS) is described which relates to the core programming of disease development, in addition to an ovarian cancer stem cell (OCSC) signature. Development various disease signature, suggests personalized treatment strategies focused on molecular subtypes of gynecological cancers, such as triage tests for patients.
    Type: Application
    Filed: April 17, 2015
    Publication date: November 12, 2015
    Applicant: CEDARS-SINAI MEDICAL CENTER
    Inventors: Sandra Orsulic, Beth Y. Karlan, Xiaojiang Cui, Mourad Tighiouart, Dong-Joo Cheon, Zhenqiu Liu
  • Publication number: 20130334036
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Application
    Filed: August 15, 2013
    Publication date: December 19, 2013
    Applicant: TEL NEXX, INC.
    Inventors: Arthur KEIGLER, John HARRELL, Zhenqiu LIU, Qunwei WU
  • Patent number: 8512543
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: August 20, 2013
    Assignee: Tel Nexx, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20120325671
    Abstract: A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.
    Type: Application
    Filed: December 17, 2010
    Publication date: December 27, 2012
    Applicant: TEL NEXX, Inc.
    Inventors: Arthur Keigler, Zhenqiu Liu, Zhongqin Zhang
  • Patent number: 8277624
    Abstract: A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
    Type: Grant
    Filed: October 17, 2011
    Date of Patent: October 2, 2012
    Assignee: Tel Nexx, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20120152752
    Abstract: A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.
    Type: Application
    Filed: December 17, 2010
    Publication date: June 21, 2012
    Applicant: Nexx Systems, Inc.
    Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
  • Publication number: 20120103799
    Abstract: A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
    Type: Application
    Filed: October 17, 2011
    Publication date: May 3, 2012
    Applicant: Nexx Systems Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Patent number: 8168057
    Abstract: A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: May 1, 2012
    Assignee: NEXX Systems, Inc.
    Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
  • Patent number: 8038856
    Abstract: A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: October 18, 2011
    Assignee: NEXX Systems, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20110240481
    Abstract: A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece.
    Type: Application
    Filed: April 6, 2010
    Publication date: October 6, 2011
    Applicant: NEXX Systems, Inc.
    Inventors: Arthur Keigler, Johannes Chiu, Zhenqiu Liu, Daniel Goodman
  • Publication number: 20110139627
    Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.
    Type: Application
    Filed: December 9, 2010
    Publication date: June 16, 2011
    Applicant: NEXX SYSTEMS, INC.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20100301564
    Abstract: A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
    Type: Application
    Filed: May 28, 2010
    Publication date: December 2, 2010
    Applicant: NEXX SYSTEMS, INC.
    Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
  • Publication number: 20100295225
    Abstract: A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
    Type: Application
    Filed: May 24, 2010
    Publication date: November 25, 2010
    Applicant: NEXX SYSTEMS INC.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Patent number: 7727366
    Abstract: A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: June 1, 2010
    Assignee: NEXX Systems, Inc.
    Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell
  • Patent number: 7722747
    Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: May 25, 2010
    Assignee: NEXX Systems, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Patent number: 7445697
    Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
    Type: Grant
    Filed: October 22, 2004
    Date of Patent: November 4, 2008
    Assignee: NEXX Systems, Inc.
    Inventors: Arthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
  • Publication number: 20060110536
    Abstract: A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.
    Type: Application
    Filed: November 2, 2005
    Publication date: May 25, 2006
    Inventors: Arthur Keigler, Qunwei Wu, Zhenqiu Liu, John Harrell