Abstract: Provided is a gas showerhead with controllable airflow distribution, disposed in a cavity of a thin film deposition device and including: a first-layer panel, having a plurality of first gas supply holes distributed according to a first rule; and a second-layer panel, seated on the first-layer panel and having a plurality of second gas supply holes distributed according to a second rule. The first rule is different from the second rule, and one of the first-layer panel and the second-layer panel is capable of rotating at least by a specific angle relative to the other, so that the two panels have a first position and a second position that are different relative to each other. At the first position, none of the first gas supply holes is covered by the second-layer panel; and at the second position, a portion of the first gas supply holes are aligned with the corresponding second gas supply holes, and the other portion of the first gas supply holes are covered by the second-layer panel.

Abstract: An apparatus for generating forecasts from a high-dimensional parameter data space comprising a reservoir model, a model order reduction module, and an assisted history matching module. The reservoir model having input variables, output variables, and an algorithmic model. The input variables, output variables, and the algorithmic model are generated by a flow simulator module and from a formation and reservoir properties database and a field production database. The model order reduction module generates a subset of the original or transformed input variables. This subset has a reduced parameter space than that of the input variables. The subset is generated using a function decomposition and a design of experiments (sensitivity analysis) to reduce number of original variables and identify original or transformed input variables that can be used to approximate output variables.

Abstract: An apparatus used to generate forecasts from a high-dimensional parameter data space. The apparatus comprising a reservoir model and a flow simulator module. The reservoir model comprising a plurality input variables, output variables, and at least one algorithmic model. The input variables and output variables are generated by the flow simulator module and variables from a formation and reservoir properties database and a field production database. The flow simulator module generates the at least one algorithmic model and the output variables using at least one selected from a group comprising a full-physics flow simulator, proxy flow simulator for assisted history matching, and a proxy flow simulator for field development optimization. The full-physics flow simulator and the two proxy flow simulators generate the at least one algorithmic model using at least one selected from a group comprising the reservoir model, history matching input variables, and optimization input variables.

Abstract: A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.

Abstract: A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.