Abstract: A semiconductor device structure is provided. The semiconductor device structure includes an isolation structure formed over a substrate, and a first stacked structure and a second stacked structure extending above the isolation structure. The first stacked structure includes a plurality of first nanostructures stacked in a vertical direction, and the second stacked structure includes a plurality of second nanostructures stacked in the vertical direction. The semiconductor device structure also includes a first dummy fin structure formed over the isolation structure, and the first dummy fin structure is between the first fin structure and the second fin structure. The semiconductor device structure includes a capping layer formed over the first dummy fin structure, and a top surface of the capping layer is higher than a top surface of the first stacked structure and a top surface of the second stacked structure.

Abstract: FinFET device and method of forming the same are provided. The method of forming the FinFET device includes the following steps. A substrate having a plurality of fins is provided. An isolation structure is on the substrate surrounding lower portions of the fins. A hybrid fin is formed aside the fins and on the isolation structure. A plurality of gate lines and a dielectric layer are formed. The gate lines are across the fins and the hybrid fin, the dielectric layer is aside the gate lines. A portion of the gate lines is removed, so as to form first trenches in the dielectric layer and in the gate lines, exposing a portion of the hybrid fin and a portion of the fins underlying the portion of the gate lines. The portion of the fins exposed by the first trench and the substrate underlying thereof are removed, so as to form a second trench under the first trench. An insulating structure is formed in the first trench and the second trench.

Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises alternately forming first semiconductor layers and second semiconductor layers over a substrate, wherein the first semiconductor layers and the second semiconductor layers include different materials and are stacked up along a direction substantially perpendicular to a top surface of the substrate; forming a dummy gate structure over the first and second semiconductor layers; forming a source/drain (S/D) trench along a sidewall of the dummy gate structure; forming inner spacers between edge portions of the first semiconductor layers, wherein the inner spacers are bended towards the second semiconductor layers; and epitaxially growing a S/D feature in the S/D trench, wherein the S/D feature contacts the first semiconductor layers and includes facets forming a recession away from the inner spacers.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a base and a multilayer stack over the base. The semiconductor device structure includes a gate stack over the substrate and wrapping around the multilayer stack. The semiconductor device structure includes a dielectric layer over the base and covering a first sidewall of the multilayer stack. A first upper surface of the dielectric layer is lower than a second upper surface of the multilayer stack. The semiconductor device structure includes a stressor over a second sidewall of the multilayer stack. The first sidewall is opposite to the second sidewall.

Abstract: A method of forming a semiconductor device includes forming a fin of alternating layers of semiconductor nanostructures and sacrificial layers, laterally etching sidewall portions of the sacrificial layers, and depositing additional semiconductor material over the sidewalls of the semiconductor nanostructures and sacrificial layers. Following deposition of a dielectric material over the additional semiconductor material and additional etching, the remaining portions of the semiconductor structures and additional semiconductor material collectively form a hammer shape at each opposing side of the fin. Epitaxial source/drain regions formed on the opposing sides of the fin will contact the heads of the hammer shapes.

Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.

Abstract: A semiconductor device includes a substrate, a first semiconductor fin and a second semiconductor fin protruding from the substrate, an isolation feature disposed on the substrate and on sidewalls of the first and second semiconductor fins, a gate structure disposed on the isolation feature. The semiconductor device also includes a dielectric fin disposed on the isolation feature and sandwiched between the first and second semiconductor fins. A middle portion of the dielectric fin separates the gate structure into a first gate structure segment engaging the first semiconductor fin and a second gate structure segment engaging the second semiconductor fin.

Abstract: A method of forming a semiconductor transistor device. The method comprises forming a fin-shaped channel structure over a substrate and forming a first source/drain epitaxial structure and a second source/drain epitaxial structure on opposite endings of the fin structure. The method further comprises forming a metal gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain epitaxial structure and the second source/drain epitaxial structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.

Abstract: A method of forming a semiconductor device includes providing a device having a gate stack including a metal gate layer. The device further includes a spacer layer disposed on a sidewall of the gate stack and a source/drain feature adjacent to the gate stack. The method further includes performing a first etch-back process to the metal gate layer to form an etched-back metal gate layer. In some embodiments, the method includes depositing a metal layer over the etched-back metal gate layer. In some cases, a semiconductor layer is formed over both the metal layer and the spacer layer to provide a T-shaped helmet layer over the gate stack and the spacer layer.

Abstract: A fin field effect transistor (FinFET) having a tunable tensile strain and an embodiment method of tuning tensile strain in an integrated circuit are provided. The method includes forming a source/drain region on opposing sides of a gate region in a fin, forming spacers over the fin, the spacers adjacent to the source/drain regions, depositing a dielectric between the spacers; and performing an annealing process to contract the dielectric, the dielectric contraction deforming the spacers, the spacer deformation enlarging the gate region in the fin.

Abstract: Self-aligned gate cutting techniques are disclosed herein that provide dielectric gate isolation fins for isolating gates of multigate devices from one another. An exemplary device includes a first multigate device having first source/drain features and a first metal gate that surrounds a first channel layer and a second multigate device having second source/drain features and a second metal gate that surrounds a second channel layer. A dielectric gate isolation fin separates the first metal gate from the second metal gate. The dielectric gate isolation fin includes a first dielectric layer having a first dielectric constant and a second dielectric layer having a second dielectric constant disposed over the first dielectric layer. The second dielectric constant is greater than the first dielectric constant. The first metal gate and the second metal gate physically contact the first channel layer and the second channel layer, respectively, and the dielectric gate isolation fin.

Abstract: The present disclosure provides a semiconductor structure and a method for manufacturing a semiconductor structure. The semiconductor structure includes a substrate, a transistor on the substrate, and an isolation structure. The transistor includes an epitaxial region on the substrate, having a first side boundary and a second side boundary opposite to the first side boundary, wherein the first side boundary of the epitaxial region is conformal to a sidewall of the isolation structure.

Abstract: A FinFET device structure is provided. The FinFET device structure includes a substrate, a fin structure formed over the substrate, and an isolation structure formed over the substrate. The fin structure protrudes from the isolation structure. The FinFET device structure further includes a fin isolation structure formed over the isolation structure and a metal gate structure formed over the fin structure and the fin isolation structure.

Abstract: A method includes forming a gate stack, which includes a gate dielectric and a metal gate electrode over the gate dielectric. An inter-layer dielectric is formed on opposite sides of the gate stack. The gate stack and the inter-layer dielectric are planarized. The method further includes forming an inhibitor film on the gate stack, with at least a portion of the inter-layer dielectric exposed, selectively depositing a dielectric hard mask on the inter-layer dielectric, with the inhibitor film preventing the dielectric hard mask from being formed thereon, and etching to remove a portion of the gate stack, with the dielectric hard mask acting as a portion of a corresponding etching mask.

Abstract: A method for manufacturing a semiconductor device is provided. The method for manufacturing a semiconductor device includes forming a gate electrode layer in a gate trench; filling a recess in the gate electrode layer with a dielectric feature; and etching back the gate electrode layer from top end surfaces of the gate electrode layer while leaving a portion of the gate electrode layer under the dielectric feature.

Abstract: A semiconductor device includes a substrate, a semiconductor layer, a gate structure, source/drain regions, a bottom isolation layer, and a bottom spacer. The semiconductor layer is above the substrate. The gate structure is above the substrate and surrounds the semiconductor layer. The source/drain regions are on opposite sides of the semiconductor layer. The bottom isolation layer is between the substrate and the semiconductor layer. The bottom spacer is on a sidewall of the bottom isolation layer.

Abstract: A semiconductor structure is provided. The semiconductor structure includes nanostructures over a substrate, a gate stack around the nanostructures, a gate spacer layer alongside the gate stack, an inner spacer layer between the gate spacer layer and the nanostructures, a source/drain feature adjoining the nanostructures, a contact plug over the source/drain feature, and a silicon germanium layer along the surface of the source/drain feature and between the contact plug and the inner spacer layer.

Abstract: A method for manufacturing a semiconductor device includes forming a semiconductor strip over a substrate. The semiconductor strip includes a first semiconductor stack and a second semiconductor stack over the first semiconductor stack. A dummy gate stack is formed to cross the semiconductor strip. The dummy gate stack is replaced with a first metal gate stack and a second metal gate stack. The first metal gate stack is in contact with the first semiconductor layer of the first semiconductor stack and the second metal gate stack is in contact with the first semiconductor layer of the second semiconductor stack.

Abstract: A method includes forming an active fin using a hard mask as an etching mask, wherein the active fin comprises a source region, a drain region, and a channel region, the hard mask remains over the active fin after etching the semiconductive substrate, and the hard mask has a first portion vertically overlapping the source region of the active fin, a second portion vertically overlapping the channel region of the active fin, and a third portion vertically overlapping the drain region of the active fin. A sacrificial gate is formed over the second portion of the hard mask and the channel region of the active fin. The first and third portions of the hard mask are etched. After etching the first and third portions of the hard mask, a gate spacer is formed extending along sidewalls of the sacrificial gate, and the sacrificial gate is replaced with a replacement gate.

Abstract: Examples of an integrated circuit with gate cut features and a method for forming the integrated circuit are provided herein. In some examples, a workpiece is received that includes a substrate and a plurality of fins extending from the substrate. A first layer is formed on a side surface of each of the plurality of fins such that a trench bounded by the first layer extends between the plurality of fins. A cut feature is formed in the trench. A first gate structure is formed on a first fin of the plurality of fins, and a second gate structure is formed on a second fin of the plurality of fins such that the cut feature is disposed between the first gate structure and the second gate structure.