Patents by Inventor Zhi Cheng Jiang

Zhi Cheng Jiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of nano thin film thickness measurement by auger electron spectroscopy
    Patent number: 7582868
    Abstract: A system and method for measuring the thickness of an ultra-thin multi-layer film on a substrate is disclosed. A physical model of an ultra-thin multilayer structure and Auger electron emission from the nano-multilayer structure is built. A mathematical model for the Auger Electron Spectroscopy (AES) measurement of the multilayer thin film thickness is derived according to the physical model. Auger electron spectroscopy (AES) is first performed on a series of calibration samples. The results are entered into the mathematical model to determine the parameters in the mathematical equation. The parameters may be calibrated by the correlation measurements of the alternate techniques. AES analysis is performed on the ultra-thin multi-layer film structure. The results are entered into the mathematical model and the thickness is calculated.
    Type: Grant
    Filed: July 27, 2005
    Date of Patent: September 1, 2009
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Zhi Cheng Jiang, Shan Dan Li, Yuen Kwan Kam, Yi Wei Liu
  • Method of nano thin film thickness measurement by auger electron spectroscopy
    Publication number: 20060138326
    Abstract: A system and method for measuring the thickness of an ultra-thin multi-layer film on a substrate is disclosed. A physical model of an ultra-thin multilayer structure and Auger electron emission from the nano-multilayer structure is built. A mathematical model for the Auger Electron Spectroscopy (AES) measurement of the multilayer thin film thickness is derived according to the physical model. Auger electron spectroscopy (AES) is first performed on a series of calibration samples. The results are entered into the mathematical model to determine the parameters in the mathematical equation. The parameters may be calibrated by the correlation measurements of the alternate techniques. AES analysis is performed on the ultra-thin multi-layer film structure. The results are entered into the mathematical model and the thickness is calculated.
    Type: Application
    Filed: July 27, 2005
    Publication date: June 29, 2006
    Inventors: Zhi Cheng Jiang, Shan Li, Yuen Kwan Kam, Yi Wei Liu