Patents by Inventor Zhi-Hung CHEN

Zhi-Hung CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11967594
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a stack of semiconductor layers spaced apart from and aligned with each other, a first source/drain epitaxial feature in contact with a first one or more semiconductor layers of the stack of semiconductor layers, and a second source/drain epitaxial feature disposed over the first source/drain epitaxial feature. The second source/drain epitaxial feature is in contact with a second one or more semiconductor layers of the stack of semiconductor layers. The structure further includes a first dielectric material disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature and a first liner disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature. The first liner is in contact with the first source/drain epitaxial feature and the first dielectric material.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: April 23, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Cheng Chen, Zhi-Chang Lin, Jung-Hung Chang, Lo Heng Chang, Chien Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20240096895
    Abstract: According to one example, a semiconductor device includes a substrate and a fin stack that includes a plurality of nanostructures, a gate device surrounding each of the nanostructures, and inner spacers along the gate device and between the nanostructures. A width of the inner spacers differs between different layers of the fin stack.
    Type: Application
    Filed: November 29, 2023
    Publication date: March 21, 2024
    Inventors: Jui-Chien Huang, Shih-Cheng Chen, Chih-Hao Wang, Kuo-Cheng Chiang, Zhi-Chang Lin, Jung-Hung Chang, Lo-Heng Chang, Shi Ning Ju, Guan-Lin Chen
  • Patent number: 11929287
    Abstract: The present disclosure describes a semiconductor structure with a dielectric liner. The semiconductor structure includes a substrate and a fin structure on the substrate. The fin structure includes a stacked fin structure, a fin bottom portion below the stacked fin structure, and an isolation layer between the stacked fin structure and the bottom fin portion. The semiconductor structure further includes a dielectric liner in contact with an end of the stacked fin structure and a spacer structure in contact with the dielectric liner.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: March 12, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Kuan-Ting Pan, Jung-Hung Chang, Lo-Heng Chang, Chien Ning Yao
  • Patent number: 11916122
    Abstract: A method for forming a gate all around transistor includes forming a plurality of semiconductor nanosheets. The method includes forming a cladding inner spacer between a source region of the transistor and a gate region of the transistor. The method includes forming sheet inner spacers between the semiconductor nanosheets in a separate deposition process from the cladding inner spacer.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Zhi-Chang Lin, Kuan-Ting Pan, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao, Kuo-Cheng Chiang
  • Patent number: 8854239
    Abstract: A data processing apparatus and a data processing method thereof are provided. The data processing apparatus includes a register and a processor electrically connected to the register. The register is stored with a plurality of data. The plurality of data each includes a first sub-datum and a second sub-datum. The plurality of first sub-data corresponds to a first column and the plurality of second sub-data corresponds to a second column. The processor compresses the first sub-data by a first compression algorithm according to a first characteristic of the plurality of first sub-data and compresses the second sub-data by a second compression algorithm according to a second characteristic of the plurality of second sub-data.
    Type: Grant
    Filed: February 17, 2013
    Date of Patent: October 7, 2014
    Assignee: Institute For Information Industry
    Inventors: Che-Rung Lee, Hao-Ping Kang, Zhi-Hung Chen, Chi-Cheng Chuang, Yu-Sheng Chiu
  • Publication number: 20140145866
    Abstract: A data processing apparatus and a data processing method thereof are provided. The data processing apparatus includes a register and a processor electrically connected to the register. The register is stored with a plurality of data. The plurality of data each includes a first sub-datum and a second sub-datum. The plurality of first sub-data corresponds to a first column and the plurality of second sub-data corresponds to a second column. The processor compresses the first sub-data by a first compression algorithm according to a first characteristic of the plurality of first sub-data and compresses the second sub-data by a second compression algorithm according to a second characteristic of the plurality of second sub-data.
    Type: Application
    Filed: February 17, 2013
    Publication date: May 29, 2014
    Applicant: INSTITUTE FOR INFORMATION INDUSTRY
    Inventors: Che-Rung LEE, Hao-Ping KANG, Zhi-Hung CHEN, Chi-Cheng CHUANG, Yu-Sheng CHIU