Patents by Inventor Zhi Po WANG

Zhi Po WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for inspecting and grounding a mask in a charged particle system
    Patent number: 12142451
    Abstract: A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: November 12, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Tianming Chen, Chiyan Kuan, Yixiang Wang, Zhi Po Wang
  • SYSTEM FOR INSPECTING AND GROUNDING A MASK IN A CHARGED PARTICLE SYSTEM
    Publication number: 20230005698
    Abstract: A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.
    Type: Application
    Filed: October 21, 2020
    Publication date: January 5, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Tianming CHEN, Chiyan KUAN, Yixiang WANG, Zhi Po WANG