Abstract: A method parses the contents of an e-Form, where the contents of said e-Form have been divided into more than one section with a different content identification code assigned to each section of the e-Form. The method includes scanning an e-Form submitted for processing to determine, based on the content identification codes, which of the sections have a corresponding parsed result already in a cache system; parsing contents of the sections without a parsed result already in the cache system; and combining parsed results from the cache system with parsed results from the parsing of sections without a parsed result already in the cache system.

Abstract: An apparatus for processing a substrate, comprising a processing chamber and a substrate support and lift pin assembly disposed within the chamber. The substrate support and lift pin assembly are coupled to a lift mechanism that controls positioning of the substrate support and the lift pins and provides rotation for the substrate support. The lift mechanism includes at least one sensor capable of generating a signal when clearance between the substrate support and the lift pins allows rotation of the substrate support to begin. The substrate support capable of concurrent axial motion and rotation may be used in a processing chamber comprising multiple processing zones separated by edge rings. Substrates may be subjected to successive or cyclical processes by moving between the multiple processing zones.

Abstract: A method parses the contents of an e-Form, where the contents of said e-Form have been divided into more than one section with a different content identification code assigned to each section of the e-Form. The method includes scanning an e-Form submitted for processing to determine, based on the content identification codes, which of the sections have a corresponding parsed result already in a cache system; parsing contents of the sections without a parsed result already in the cache system; and combining parsed results from the cache system with parsed results from the parsing of sections without a parsed result already in the cache system.