Patents by Inventor Zhi-Zan Chuang

Zhi-Zan Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Convex profile anode for electroplating system
    Publication number: 20030221958
    Abstract: An electroplating anode including a substantially convex oxidizing surface for oxidation of metal atoms in a semiconductor wafer electroplating process. The electroplating anode of the present invention substantially prolongs the lifetime of the anode and contributes to the prevention of wafer contamination due to generation of potential wafer-contaminating precipitate particles during a wafer electroplating process.
    Type: Application
    Filed: May 30, 2002
    Publication date: December 4, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tro-Hsu Lin, Tien-Chen Hu, Hong-Jin Pu, Zhi-Zan Chuang