Patents by Inventor Zhi-Zan Zhuang

Zhi-Zan Zhuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Convex profile anode for electroplating system
    Patent number: 7014739
    Abstract: An electroplating anode including a substantially convex oxidizing surface for oxidation of metal atoms in a semiconductor wafer electroplating process. The electroplating anode of the present invention substantially prolongs the lifetime of the anode and contributes to the prevention of wafer contamination due to generation of potential wafer-contaminating precipitate particles during a wafer electroplating process.
    Type: Grant
    Filed: May 30, 2002
    Date of Patent: March 21, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tro-Hsu Lin, Tien-Chen Hu, Hong-Jin Pu, Zhi-Zan Zhuang