Patents by Inventor Zhi Zhong Ke

Zhi Zhong Ke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHOWERHEAD AND A THIN-FILM DEPOSITION APPARATUS CONTAINING THE SAME
    Publication number: 20170002463
    Abstract: A thin-film deposition apparatus comprises a chamber; a carrier in the chamber; a showerhead on the carrier, wherein the showerhead comprises multiple first gas-dispensing holes, multiple second gas-dispensing holes and multiple plasma-generating portions; and a first gas inlet system for providing a first process gas, wherein the first process gas outputted from the multiple first gas-dispensing holes.
    Type: Application
    Filed: June 30, 2016
    Publication date: January 5, 2017
    Inventors: Nai-Wen Fan, Shau-Yi Chen, Ai-Sen Liu, Zhi Zhong Ke, Chien-Bao Lin, Wen-Hao Zhuo, Feng-Zhi Chen, Chien-Cheng Kuo, Shih-Hao Chan, Chih-Hao Chen, Wei-Chih Peng, Chia-Liang Hsu