Abstract: The present invention provides a device for blocking plasma backflow in a process chamber to protect an air inlet structure, comprising an air inlet nozzle tightly connected to an air inlet flange. The inner cavity of the air inlet nozzle is provided with an air inlet guide body, wherein the air inlet guide body has an upper structure, a middle structure, and a lower structure, the upper, middle, and lower structures are an integrated structure, the upper, middle, and lower structures are all cylindrical, the cross-sectional diameter of the upper structure is smaller than that of the middle structure, a gas gathering area is arranged between the middle structure and the lower structure, and the middle structure and the lower structure are connected by the gas gathering area.

Abstract: In a folding mechanism, a first housing seat is rotatably disposed on a first screen support plate, a second housing seat is rotatably disposed on a second screen support plate, and a third screen support plate is movably connected to a base in a support direction of the third screen support plate; the first housing seat is rotatably connected to the base via a first swing arm, the second housing seat is rotatably connected to the base via a second swing arm, the first screen support plate is slidably and rotatably connected to the base via a third swing arm, the second screen support plate is slidably and rotatably connected to the base via a fourth swing arm, a rotation axis of the first swing arm is spaced apart from that of the third swing arm.

Abstract: An electrode cap grinding and changing machine is provided. The machine includes a frame, a drive motor having an output end and a balanced floating unit, wherein the balanced floating unit is arranged on the frame, and the drive motor is arranged on the balanced floating unit, the output end of the drive motor penetrates through the balanced floating unit and then is connected with a working table having two sides, the two sides of the working table having a cap dismounting unit and a cap grinding unit drivably interconnected with the output end of the drive motor, and electrode cap storage units arranged at an outermost end of the two sides of the working table or on the frame.

Abstract: An electrode cap grinding and changing machine is provided. The machine includes a frame, a drive motor having an output end and a balanced floating unit, wherein the balanced floating unit is arranged on the frame, and the drive motor is arranged on the balanced floating unit, the output end of the drive motor penetrates through the balanced floating unit and then is connected with a working table having two sides, the two sides of the working table having a cap dismounting unit and a cap grinding unit drivably interconnected with the output end of the drive motor, and electrode cap storage units arranged at an outermost end of the two sides of the working table or on the frame.