Abstract: The present invention discloses a micro-electro-mechanical system silicon on insulator (MEMS SOI) pressure sensor and a method for preparing the same. The pressure sensor includes a bulk silicon layer, a buried oxide layer, a substrate, a varistor, a passivation layer, and an electrode layer. The varistor is obtained by means of photolithography and ion implantation on a device layer of an SOI wafer. The passivation layer is SiO2 formed by means of annealing treatment on the SOI wafer. An annealing atmosphere is one of pure O2, a gas mixture of O2/H2O, a gas mixture of O2/NO, a gas mixture of O2/HCl, and a gas mixture of O2/CHF3. By means of the annealing treatment, the damage to a surface of the buried oxide layer as a result of over-etching during formation of the varistor by means of photolithography is eliminated and the unstability of the sensor caused by body and interface defects of the passivation layer and trapped charges thereof is resolved.

Abstract: The present invention discloses a micro-electro-mechanical system silicon on insulator (MEMS SOI) pressure sensor and a method for preparing the same. The pressure sensor includes a bulk silicon layer, a buried oxide layer, a substrate, a varistor, a passivation layer, and an electrode layer. The varistor is obtained by means of photolithography and ion implantation on a device layer of an SOI wafer. The passivation layer is SiO2 formed by means of annealing treatment on the SOI wafer. An annealing atmosphere is one of pure O2, a gas mixture of O2/H2O, a gas mixture of O2/NO, a gas mixture of O2/HCl, and a gas mixture of O2/CHF3. By means of the annealing treatment, the damage to a surface of the buried oxide layer as a result of over-etching during formation of the varistor by means of photolithography is eliminated and the unstability of the sensor caused by body and interface defects of the passivation layer and trapped charges thereof is resolved.

Abstract: A flow sensing module is provided for determining a flow rate of a fluid flowing through a flow channel. The flow sensing module may include an integrated flow restrictor, sometimes including a plurality of concentric ribs defining a plurality of orifices shaped to match the curvature of the wall of the flow channel. A first sensing port may open into the flow channel upstream of the flow restrictor, and a second sensing port may open into the flow channel downstream of the flow restrictor. A flow rate of a fluid flowing through the flow channel may be determining using a differential pressure between the first and second ports created by the flow restrictor, either using a flow sensor or a pressure sensor. The particular arrangement and relative dimensions of the orifices of the flow restrictor and the pressure ports can result in substantially reduced noise.

Abstract: A flow sensing module is provided for determining a flow rate of a fluid flowing through a flow channel. The flow sensing module may include an integrated flow restrictor, sometimes including a plurality of concentric ribs defining a plurality of orifices shaped to match the curvature of the wall of the flow channel. A first sensing port may open into the flow channel upstream of the flow restrictor, and a second sensing port may open into the flow channel downstream of the flow restrictor. A flow rate of a fluid flowing through the flow channel may be determining using a differential pressure between the first and second ports created by the flow restrictor, either using a flow sensor or a pressure sensor. The particular arrangement and relative dimensions of the orifices of the flow restrictor and the pressure ports can result in substantially reduced noise.