Abstract: A method and system for predicting the quality factor of a mechanical resonant (MR) device. The system and method simulates uncoupled elastic vibration of the MR device to produce simulated dilatation and collects data relating to the dilatation and maximum stored elastic vibration energy. It determines the internal heat source data of the MR device caused by dilatation based on the thermal expansion effect of the MR device material, conveying the internal heat source data along with transient heat conduction data to a simulation engine, which simulates and determines the temperature variation. Thermoelastic damping over one cycle of vibration is determined, enabling the prediction of the quality factor relating to thermoelastic damping over one cycle of vibration of the MR device, and the maximum elastic vibration energy stored over one cycle of vibration.

Abstract: Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.

Abstract: A method and computer system for predicting or calculating the quality factor of a mechanical resonant (MR) device. The system and method simulates uncoupled elastic vibration of the MR device to produce simulated dilatation of the MR device, collects data relating to the dilatation and maximum stored elastic vibration energy of the device design. It determines the internal heat source data of the MR device caused by dilatation based on the thermal expansion effect of the MR device material, conveying the internal heat source data along with transient heat conduction data to a simulation engine, which simulates and determines the temperature variation within the MR device. Thermoelastic damping over one cycle of vibration of the MR device is determined, enabling the determination of the quality factor relating to thermoelastic damping as a function of the thermoelastic damping over one cycle of vibration of the MR device, and the maximum elastic vibration energy stored over one cycle of vibration.

Abstract: Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.

Abstract: A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

Abstract: A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices and a resonant tube used therein. A vertical comb-drive can provides an acoustic source through a driving plate to the resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

Abstract: A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.