Patents by Inventor Zhili Zuo

Zhili Zuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240060860
    Abstract: A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
    Type: Application
    Filed: October 24, 2023
    Publication date: February 22, 2024
    Inventors: Changgong Wang, Zhili Zuo, Chang Ke, Song-Moon Suh
  • Patent number: 11815436
    Abstract: A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
    Type: Grant
    Filed: August 11, 2022
    Date of Patent: November 14, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Changgong Wang, Zhili Zuo, Chang Ke, Song-Moon Suh
  • Publication number: 20220381653
    Abstract: A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
    Type: Application
    Filed: August 11, 2022
    Publication date: December 1, 2022
    Inventors: Changgong Wang, Zhili Zuo, Chang Ke, Song-Moon Suh
  • Patent number: 11441974
    Abstract: Disclosed herein is a method comprising directing, from a distribution unit, a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from the surface of the article; collecting, on a surface of a substrate having a pre-determined initial state comprising initial surface particles on the surface of the substrate or a real-time aerosol sampling unit, at least some of the portion of the plurality of surface particles dislodged from the surface of the article; analyzing the surface of the substrate after performing the collecting; and determining at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: September 13, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Changgong Wang, Zhili Zuo, Chang Ke, Song-Moon Suh
  • Publication number: 20210033499
    Abstract: Disclosed herein is a method comprising directing, from a distribution unit, a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from the surface of the article; collecting, on a surface of a substrate having a pre-determined initial state comprising initial surface particles on the surface of the substrate or a real-time aerosol sampling unit, at least some of the portion of the plurality of surface particles dislodged from the surface of the article; analyzing the surface of the substrate after performing the collecting; and determining at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged
    Type: Application
    Filed: August 1, 2019
    Publication date: February 4, 2021
    Inventors: ChangGong Wang, Zhili Zuo, Chang Ke, Song-Moon Suh
  • Patent number: 10755903
    Abstract: A method of cleaning a remote plasma source includes supplying a first cycle of one or more first cleaning gases to a remote plasma source. The method includes supplying a second cycle of one or more second cleaning gases to the remote plasma source. The method includes supplying one or more cooling fluids to one or more cooling conduits coupled with the remote plasma source.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: August 25, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Sidharth Bhatia, Zhili Zuo, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian
  • Publication number: 20170207069
    Abstract: A method of cleaning a remote plasma source includes supplying a first cycle of one or more first cleaning gases to a remote plasma source. The method includes supplying a second cycle of one or more second cleaning gases to the remote plasma source. The method includes supplying one or more cooling fluids to one or more cooling conduits coupled with the remote plasma source.
    Type: Application
    Filed: January 4, 2017
    Publication date: July 20, 2017
    Inventors: Sidharth BHATIA, Zhili ZUO, Hidehiro KOJIRI, Anjana M. PATEL, Song-Moon SUH, Ganesh BALASUBRAMANIAN
  • Publication number: 20090182133
    Abstract: The invention relates to pharmaceutical compositions comprising benzopyranone derivatives for the treatment of Severe Acute Respiratory Syndrome (SARS).
    Type: Application
    Filed: December 15, 2006
    Publication date: July 16, 2009
    Inventors: Chum Mok Puah, Weiliang Zhu, Jian Li, Lili Chen, Cheng Luo, Gang Chen, Zhili Zuo, Xiaomin Luo, Xu Shen, Kaixian Chen, Hualiang Jiang