Patents by Inventor Zhiqiang Guo
Zhiqiang Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11924972Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.Type: GrantFiled: June 2, 2020Date of Patent: March 5, 2024Assignee: Applied Materials, Inc.Inventors: Phillip A. Criminale, Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman
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Publication number: 20240030815Abstract: A control circuit for a switch-mode power supply, a power circuit, and an electronic device. The control circuit outputs a control signal to control a switching frequency of the switch-mode power supply. The control circuit adjusts, in a plurality of cycles, a frequency of the control signal based on a plurality of ranges, and controls, in each cycle, the frequency of the control signal to change with time in a range corresponding to each cycle. In the embodiments, a frequency-domain energy dispersion degree of the control signal output by the control circuit can be increased, electromagnetic interference generated by the control signal output by the control circuit is reduced, and finally, it is ensured that the power circuit and the electronic device including the power circuit can pass a related security test.Type: ApplicationFiled: July 11, 2023Publication date: January 25, 2024Applicant: Huawei Digital Power Technologies Co., Ltd.Inventors: Chenghao SUN, Baolei DAI, Bo WANG, Zhiqiang GUO
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Publication number: 20240023246Abstract: A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes storing the sensor data in a memory of the diagnostic disc. The method further includes wirelessly transmitting the sensor data to the computing system, using the wireless communication circuit. The method further includes terminating the secure wireless connection with the computing system and clearing the sensor data from the memory of the diagnostic disc.Type: ApplicationFiled: September 28, 2023Publication date: January 18, 2024Inventors: Phillip A. Criminale, Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman
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Publication number: 20240022083Abstract: A system includes an enclosure configured to couple to an equipment front end module (EFEM) of a substrate processing system, a charging assembly, and one or more support structures within the enclosure. The one or more support structures are configured to support a validation wafer in a charging position to charge the validation wafer via the charging assembly.Type: ApplicationFiled: September 27, 2023Publication date: January 18, 2024Inventors: Phillip Alfred Criminale, Zhiqiang Guo, Andrew S.C. Ho, Rachel Sara Stolzman, Michael Carl Hankes
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Publication number: 20230413446Abstract: A method includes causing, by a computing system comprising at least one processing device, a diagnostic disc placed within a processing chamber to generate sensor data of at least one component of the processing chamber using a set of non-contact sensors of the diagnostic disc, receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc, determining, by the computing system based on the sensor data, whether at least one of alignment concentricity is skewed with respect to the at least one component, and in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.Type: ApplicationFiled: September 6, 2023Publication date: December 21, 2023Inventors: Phillip A. Criminale, Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman, Nelson Joseph Gaspard, Timothy Joseph Franklin, Michael A. Stearns
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Patent number: 11817724Abstract: An enclosure system includes multiple walls forming an interior volume. The enclosure system is configured to couple to an equipment front end module (EFEM) of a substrate processing system. The enclosure system further includes a charging assembly including a first charging coil. The enclosure system further includes one or more first support structures disposed within the interior volume under the first charging coil. The one or more first support structures are configured to support a first validation wafer within a threshold distance of the first charging coil to charge the first validation wafer via the charging assembly.Type: GrantFiled: March 2, 2022Date of Patent: November 14, 2023Assignee: Applied Materials, Inc.Inventors: Phillip Alfred Criminale, Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes
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Publication number: 20230347002Abstract: A decontamination device capable of confirming accurate operations of a mist circulation dispersion means before and after or during a decontamination operation and guaranteeing the overall operation as a decontamination device. The device includes a mist supply means, a mist circulation dispersion means, and an ultrasonic detection means. The mist supply means converts a chemical for decontamination of the inside of a working chamber of the device into a mist for decontamination and supplies such mist to the inside of the working chamber. The mist circulation dispersion means subjects a vibrating board (which includes a plurality of ultrasonic transmitters) to ultrasonic vibration to generate sound flows with ultrasound from board surfaces in the vertical direction and presses the mist with acoustic radiation pressure of the sound flows in order to circulate and disperse the mist for decontamination in the working chamber.Type: ApplicationFiled: November 4, 2021Publication date: November 2, 2023Inventors: Tsukasa KITANO, Zhiqiang GUO, Kazuhiko KITAHORA, Yoshitaka OGATA, Daisuke KAKUDA, Yoshiaki OKADA, Koji KAWASAKI
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Patent number: 11759829Abstract: A method for decontaminating a low-temperature article, the method comprising: an applying step including applying a decontamination agent to external surfaces of a low-temperature article and supplying a mist of decontamination agent to a first external surface of said low-temperature article to form a condensed film of the decontamination agent on said first external surface; and a drying step including ultrasonically vibrating vibration boards disposed on a periphery of the low-temperature article to generate sound flows from board surfaces by an ultrasound in a vertical direction, irradiating with ultrasonic waves the low-temperature article with the decontamination agent applied thereto, subjecting said first external surface of the low-temperature article to ultrasonic vibration and acoustic radiation pressure, supplying dry air to the first external surface and drying said first external surface.Type: GrantFiled: March 17, 2020Date of Patent: September 19, 2023Inventors: Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki, Tsukasa Kitano, Zhiqiang Guo, Ayumi Ogawa
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Publication number: 20230283086Abstract: An enclosure system includes multiple walls forming an interior volume. The enclosure system is configured to couple to an equipment front end module (EFEM) of a substrate processing system. The enclosure system further includes a charging assembly including a first charging coil. The enclosure system further includes one or more first support structures disposed within the interior volume under the first charging coil. The one or more first support structures are configured to support a first validation wafer within a threshold distance of the first charging coil to charge the first validation wafer via the charging assembly.Type: ApplicationFiled: March 2, 2022Publication date: September 7, 2023Inventors: Phillip Alfred Criminale, Zhiqiang Guo, Andrew S.C. Ho, Rachel Sara Stolzman, Michael Carl Hankes
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Publication number: 20230199992Abstract: A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, at a vacuum of about 0.1 mTorr to about 50 mTorr and a temperature of about ?20° C. to about 120° C., by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes wirelessly transmitting the sensor data to the computing system via the secure wireless connection using the wireless communication circuit. The diagnostic disc includes a disc-shaped body, a printed circuit board (PCB), a power source coupled to the PCB, a casing that encapsulates the power source, and a cover positioned over the PCB and the power source.Type: ApplicationFiled: February 14, 2023Publication date: June 22, 2023Inventors: Phillip A. Criminale, Zhiqiang Guo, Philip A. Kraus, Andrew Myles, Martin Perez-Guzman
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Publication number: 20230132065Abstract: The present invention can provide an incubator having not only a favorable cell culture function but also an autonomous decontamination function that saves the need for connection to an external decontamination device. The incubator provided with a culture vessel, a circulating means, a temperature-regulating means, and a gas supplying means for supplying a decontamination gas or a humidifying water vapor. The gas supplying means includes a compressed gas generating means, a decontamination solution supplying means, a water supplying means, a mixed gas/liquid regulator, and a vaporizer for generating a decontamination gas or a water vapor.Type: ApplicationFiled: April 12, 2021Publication date: April 27, 2023Inventors: Koji KAWASAKI, Yoshitaka OGATA, Hideo NISHIWAKI, Daisuke KAKUDA, Jun MASUDOME, Yukihiro YAZAKI, Zhiqiang GUO, Tsukasa KITANO
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Patent number: 11589474Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.Type: GrantFiled: June 2, 2020Date of Patent: February 21, 2023Assignee: Applied Materials, Inc.Inventors: Phillip A. Criminale, Zhiqiang Guo, Philip A. Kraus, Andrew Myles, Martin Perez-Guzman
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Publication number: 20220378964Abstract: The present invention achieves a decontamination effect with a proper amount of hydrogen peroxide mist supplied to a room to be decontaminated by further refining such hydrogen peroxide mist supplied to the room for dispersion/diffusion, and reducing the duration of operations such as aeration to increase efficiency of decontamination. The decontamination system includes a mist generation means, a mist discharge port, and a mist dispersion/diffusion means. The mist generation means converts a decontamination liquid into a mist to generate a mist for decontamination. The mist discharge port is opened at an upper portion on an internal side wall surface of the room to discharge a such mist into the inside of the room.Type: ApplicationFiled: October 21, 2020Publication date: December 1, 2022Inventors: Koji KAWASAKI, Gun SOU, Tsukasa KITANO, Zhiqiang GUO, Haruka FUTAMURA, Yukihiro YAZAKI, Daisuke KAKUDA, Jun MASUDOME
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Publication number: 20220370666Abstract: A decontamination system not requiring large-scale equipment such as large-diameter ducts and anti-condensation heaters and for that reason capable of efficiently using a decontamination liquid. Long pipes can be installed for each of a plurality of rooms to be decontaminated, a decontamination liquid is not present in supply pipes as a residual dead liquid, and a proper amount of decontamination liquid can essentially be supplied for each room to cause no failure of an ultrasonic vibrator. The decontamination system employs a decontamination mist and includes a compressed air generating means and a decontamination liquid supplying means, and each room to be decontaminated is provided with a primary mist generating means and a secondary mist generating means.Type: ApplicationFiled: October 15, 2020Publication date: November 24, 2022Inventors: Koji KAWASAKI, Gun SOU, Tsukasa KITANO, Zhiqiang GUO, Haruka FUTAMURA, Yukihiro YAZAKI, Daisuke KAKUDA, Jun MASUDOME
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Publication number: 20220277982Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.Type: ApplicationFiled: May 20, 2022Publication date: September 1, 2022Inventors: Phillip CRIMINALE, Zhiqiang GUO, Andrew MYLES
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Publication number: 20220262605Abstract: Temperature measurement is described for a substrate carrier using a heater element array. In one example a method includes measuring a first combined current load of each of a plurality of heating elements in the electrostatic chuck, changing a power status of a first heating element of the plurality of heating elements, measuring a second combined current load of each of the plurality of heating elements after changing the power status of the first heating element, determining the difference between the first and second combined current loads, determining a temperature of the first heating element using the difference, and reverting the power status of the first heating element to that before the change and repeating changing power, measuring a current load, determining a difference, and determining a temperature for each of the other heating elements of the plurality to determine a temperature at each of the heating elements of the plurality.Type: ApplicationFiled: May 4, 2022Publication date: August 18, 2022Inventors: Phillip Criminale, Zhiqiang Guo
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Patent number: 11378509Abstract: An evaluation method for hydrogen-bearing components, porosity and pore size distribution of organic-rich shale is provided, relating to a technical field of oil and gas development. The evaluation method includes steps of: according to differences among NMR (nuclear magnetic resonance) T1-T2 maps of kerogen, oil-adsorbed kerogen, clay minerals of different water-containing conditions, shale, dry shale sample, oil-saturated shale sample and water-saturated shale sample, establishing a classification scheme for each hydrogen-bearing component and a quantitative characterization method for fluid components of the organic-rich shale; with a T2 distribution of the organic-rich shale after being saturated with oil as a target and a T2 distribution of the dry shale sample as a basement, subtracting the basement, and obtaining a T2 distribution of oil in pores; and based on the T2 distribution of oil in the pores, evaluating the porosity and the pore size distribution of the organic-rich shale.Type: GrantFiled: December 4, 2018Date of Patent: July 5, 2022Assignee: CHINA UNIVERSITY OF PETROLEUM(EAST CHINA)Inventors: Min Wang, Jinbu Li, Zhiqiang Guo, Chuanming Li, Shuangfang Lu
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Publication number: 20220193291Abstract: A pass box configured to accommodate and decontaminate an article by concentrating a mist of decontamination agent on an article's surface and to reduce a duration of aeration operations. The box includes a decontamination chamber, an aeration chamber in which residue of the decontamination agent is removed from the article's surface, a decontamination agent supply device, a decontamination agent control device, a moving device configured to reposition the article, and an air supply and exhaust device. The decontamination agent supply device converts a chemical into the mist and supplies it into the decontamination chamber. The decontamination agent control device includes vibration boards that are adjacent to internal wall surfaces of the decontamination chamber and that are ultrasonically vibrated to generate sound flows in the vertical direction thereby pressing the mist with acoustic radiation to concentrate the mist on the external surfaces of the article.Type: ApplicationFiled: March 18, 2020Publication date: June 23, 2022Inventors: Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Tsukasa KITANO, Zhiqiang GUO
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Publication number: 20220193290Abstract: A decontamination device configured to provide, on a short time scale, uniform decontamination of target articles without using expensive electron accelerators and to treat articles to be decontaminated in large quantities. The device includes a device body composed of a decontamination region and an aeration region, a conveyance means for conveying an article, a mist supply means, a mist control means, and an aeration means. The mist supply means converts a decontamination agent into a decontamination agent mist and supplies the same to the inside of the decontamination region. The mist control means includes vibration boards adjacent to internal wall surfaces of the decontamination region, and these boards are ultrasonically vibrated to generate sound flows from board surfaces by an ultrasound in the vertical direction.Type: ApplicationFiled: March 17, 2020Publication date: June 23, 2022Inventors: Koji KAWASAKI, Daisuke KAKUDA, Jun MASUDOME, Haruka FUTAMURA, Yukihiro YAZAKI, Tsukasa KITANO, Zhiqiang GUO, Ayumi OGAWA
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Patent number: 11367645Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.Type: GrantFiled: March 13, 2019Date of Patent: June 21, 2022Assignee: Applied Materials, Inc.Inventors: Phillip Criminale, Zhiqiang Guo, Andrew Myles