Abstract: A decontamination system not requiring large-scale equipment such as large-diameter ducts and anti-condensation heaters and for that reason capable of efficiently using a decontamination liquid. Long pipes can be installed for each of a plurality of rooms to be decontaminated, a decontamination liquid is not present in supply pipes as a residual dead liquid, and a proper amount of decontamination liquid can essentially be supplied for each room to cause no failure of an ultrasonic vibrator. The decontamination system employs a decontamination mist and includes a compressed air generating means and a decontamination liquid supplying means, and each room to be decontaminated is provided with a primary mist generating means and a secondary mist generating means.

Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.

Abstract: Temperature measurement is described for a substrate carrier using a heater element array. In one example a method includes measuring a first combined current load of each of a plurality of heating elements in the electrostatic chuck, changing a power status of a first heating element of the plurality of heating elements, measuring a second combined current load of each of the plurality of heating elements after changing the power status of the first heating element, determining the difference between the first and second combined current loads, determining a temperature of the first heating element using the difference, and reverting the power status of the first heating element to that before the change and repeating changing power, measuring a current load, determining a difference, and determining a temperature for each of the other heating elements of the plurality to determine a temperature at each of the heating elements of the plurality.

Abstract: An evaluation method for hydrogen-bearing components, porosity and pore size distribution of organic-rich shale is provided, relating to a technical field of oil and gas development. The evaluation method includes steps of: according to differences among NMR (nuclear magnetic resonance) T1-T2 maps of kerogen, oil-adsorbed kerogen, clay minerals of different water-containing conditions, shale, dry shale sample, oil-saturated shale sample and water-saturated shale sample, establishing a classification scheme for each hydrogen-bearing component and a quantitative characterization method for fluid components of the organic-rich shale; with a T2 distribution of the organic-rich shale after being saturated with oil as a target and a T2 distribution of the dry shale sample as a basement, subtracting the basement, and obtaining a T2 distribution of oil in pores; and based on the T2 distribution of oil in the pores, evaluating the porosity and the pore size distribution of the organic-rich shale.

Abstract: A pass box configured to accommodate and decontaminate an article by concentrating a mist of decontamination agent on an article's surface and to reduce a duration of aeration operations. The box includes a decontamination chamber, an aeration chamber in which residue of the decontamination agent is removed from the article's surface, a decontamination agent supply device, a decontamination agent control device, a moving device configured to reposition the article, and an air supply and exhaust device. The decontamination agent supply device converts a chemical into the mist and supplies it into the decontamination chamber. The decontamination agent control device includes vibration boards that are adjacent to internal wall surfaces of the decontamination chamber and that are ultrasonically vibrated to generate sound flows in the vertical direction thereby pressing the mist with acoustic radiation to concentrate the mist on the external surfaces of the article.

Abstract: A decontamination device configured to provide, on a short time scale, uniform decontamination of target articles without using expensive electron accelerators and to treat articles to be decontaminated in large quantities. The device includes a device body composed of a decontamination region and an aeration region, a conveyance means for conveying an article, a mist supply means, a mist control means, and an aeration means. The mist supply means converts a decontamination agent into a decontamination agent mist and supplies the same to the inside of the decontamination region. The mist control means includes vibration boards adjacent to internal wall surfaces of the decontamination region, and these boards are ultrasonically vibrated to generate sound flows from board surfaces by an ultrasound in the vertical direction.

Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.

Abstract: The present invention provides a decontamination device capable of accomplishing a decontamination effect with a proper amount of decontamination agent by employing a mist control mechanism and concentrating a mist for decontamination on the surface of an article to be conveyed, and reducing the duration of operations such as aeration to achieve more efficient decontamination works, and a pass box in which the decontamination device is disposed. The decontamination device of the present invention includes a mist supply means and a mist control mechanism, and the mist supply means converts a chemical for decontamination into a mist for decontamination, and supplies the same to the inside of a working chamber that accommodates the article. The mist control mechanism includes vibration boards disposed adjacent to internal wall surfaces of the working chamber, and the vibration boards are ultrasonically vibrated to generate sound flows from board surfaces by an ultra sound in the vertical direction.

Abstract: Temperature measurement is described for a substrate carrier using a heater element array. In one example a method includes measuring a first combined current load of each of a plurality of heating elements in the electrostatic chuck, changing a power status of a first heating element of the plurality of heating elements, measuring a second combined current load of each of the plurality of heating elements after changing the power status of the first heating element, determining the difference between the first and second combined current loads, determining a temperature of the first heating element using the difference, and reverting the power status of the first heating element to that before the change and repeating changing power, measuring a current load, determining a difference, and determining a temperature for each of the other heating elements of the plurality to determine a temperature at each of the heating elements of the plurality.

Abstract: A mist supply device configured to decontaminate a target with a proper amount of decontamination agent supplied to the target by converting such agent into a fine mist, and reducing the duration of operations such as aeration to increase decontamination efficiency. The device includes a mist generation means, a mist microparticulating means, and a supply port. The mist generation means converts the decontamination agent into a primary mist and supplies it to the mist microparticulating means, which includes at least one vibration board that is subjected to ultrasonic vibration to generate sound flows from board surfaces by an ultrasound in the vertical direction. The supplied primary mist is subjected to ultrasonic vibration by the sound flows to reduce the primary mist into a secondary mist of smaller size. The generated secondary mist is supplied to the inside of the room through the supply port.

Abstract: The present invention relates to methods for producing a stable amorphous dispersion of a pharmaceutically active substance having poor water solubility by applying low frequency acoustic energy to a mixture comprising the active substance and at least one polymer and heating the mixture until a stable amorphous dispersion is formed. The methods of the invention are an effective means of converting a crystalline API to a substantially amorphous and stable form, i.e., wherein the crystallinity is less than about 5%. The methods of the invention result in more complete amorphization, increased solubility, drug loading and stability as compared typical amorphization or literature methods.

Abstract: A method for decontaminating a low-temperature article to accomplish decontaminating a surface of the such article, and to reduce duration of operations to increase efficiency of decontamination, and a pass box used in such method. The method includes an applying step of applying a decontamination agent to external surfaces of the article, and a drying step of irradiating the article with agent thereon with ultrasonic waves and drying the surface. In the applying step, a gas, fog or mist of the decontamination agent is supplied to a target surface to form a condensed film of the agent on the target surface. In the drying step, dry air is supplied to the target surface.

Abstract: Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heater assembly. The substrate support assembly comprises an upper surface and a lower surface; one or more main resistive heaters disposed in the substrate support; and a plurality of heaters in column with the main resistive heaters and disposed in the substrate support. A quantity of the heaters is an order of magnitude greater than a quantity of the main resistive heaters and the heaters are independently controllable relative to each other as well as the main resistive heater.

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

Abstract: The present invention discloses an anchoring apparatus and an operation method thereof. The anchoring apparatus includes: a movable framework (1); a folding-type working platform (2) that includes a working platform frame (203), a longitudinal guide (204), a transverse guide (205) and a central turntable (206), the longitudinal guide (204) being movable along the transverse guide (205), and the central turntable (206) driving the longitudinal guide (204) and the transverse guide (205) to rotate relative to the working platform frame (203); a drilling machine (3); a workpiece supply system (4); and a power control system (5) that drives the movable framework (1) to move. With the anchoring apparatus, the mechanical and automatic anchoring with anchor bolts and anchor cables can be implemented in anchoring, the labor intensity in anchoring can be greatly reduced, the efficiency of anchoring can be improved, and the safety in the entire process can be enhanced.

Abstract: A substrate carrier is described with an array of independently controllable heater elements. In one example an apparatus includes a substrate carrier to carry a substrate for processing, a plurality of resistive heating elements in the carrier to heat the substrate by heating the carrier, a power supply to supply power to the heating elements, a power controller to provide a control signal, the control signal to control an amount of current applied to each of the heating elements, and a plurality of power interfaces in the carrier each coupled to a heating element to receive the power from the power supply and the control signal from the controller and to modulate the power applied to a respective coupled heating element in response to the control signal.

Abstract: Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heater assembly. The substrate support assembly comprises an upper surface and a lower surface; one or more main resistive heaters disposed in the substrate support; and a plurality of heaters in column with the main resistive heaters and disposed in the substrate support. A quantity of the heaters is an order of magnitude greater than a quantity of the main resistive heaters and the heaters are independently controllable relative to each other as well as the main resistive heater.

Abstract: The present invention provides a microorganism inspection system that is capable of instantly inspecting individual containers for microorganism contamination of the containers that are filled with or accommodate medicines and the like. The present invention has a supply means for supplying a predetermined amount of clean air to the inside or the outer surface of a container, a collecting means for collecting the air supplied to the container by the supply means, and a detecting means for detecting microorganisms included in the air collected by the collecting means.

Abstract: An incubator which can uniformly maintain a temperature/humidity in a culture chamber and prevent dew condensation from occurring in the culture chamber is provided. Further, an incubator which raises an air pressure in a culture chamber higher than that of the external environment to maintain an aseptic environment and prevents water vapor to be supplied from adversely affecting the inner aseptic environment is provided. An incubator includes a culture chamber including an insulated door and insulated wall, circulating means for circulating air in the culture chamber, temperature regulating means for regulating a temperature of the air in the culture chamber, and humidifying means for humidifying the air in the culture chamber.