Patents by Inventor ZHIWEN KANG

ZHIWEN KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12217927
    Abstract: A system and a method for manipulating a beam of an Advanced Charge Controller module in different planes in an e-beam system are provided. Some embodiments of the system include a lens system configured to manipulate a beam in the tangential plane and the sagittal plane such that the beam spot is projected onto the wafer with high luminous energy. Some embodiments of the system include a lens system comprising at least two cylindrical lens.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: February 4, 2025
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Ning Ye, Zhiwen Kang, Yixiang Wang
  • Publication number: 20250037966
    Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.
    Type: Application
    Filed: October 9, 2024
    Publication date: January 30, 2025
    Applicant: ASML Netherlands B.V.
    Inventors: Jinmei YANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20240402093
    Abstract: Systems, apparatuses, and methods for detecting a location of a positioned sample may include an electrostatic holder configured to hold a sample and form a gap area between an outside edge of the sample and a structure of the electrostatic holder when the electrostatic holder holds the sample, wherein the gap area is coated with a first coating configured to reflect a first wavelength of light with first brightness and to reflect a second wavelength of the light with second brightness, the first wavelength is within a predetermined range of wavelengths, the second wavelength is outside the predetermined range of wavelengths, and the first brightness is higher than the second brightness; a light source configured to direct the light at the gap area; and an optical detector configured to image the light reflected off the gap area.
    Type: Application
    Filed: August 3, 2022
    Publication date: December 5, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Xiaodong MENG, Zhiwen KANG, Jian ZHANG, Kangsheng QIU
  • Patent number: 12142456
    Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: November 12, 2024
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Jinmei Yang, Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Publication number: 20240369356
    Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.
    Type: Application
    Filed: July 17, 2024
    Publication date: November 7, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Yan WANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Patent number: 12072181
    Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.
    Type: Grant
    Filed: September 28, 2021
    Date of Patent: August 27, 2024
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Yan Wang, Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Publication number: 20240158910
    Abstract: A microwave plasma chemical vapor deposition device, including a microwave generator, an isolator, a 3-stub microwave tuner, a microwave mode converter, and a short-circuiting waveguide tuner connected successively is disclosed. A microwave antenna and an upper cooling air inlet stretching into a microwave cavity and corresponding to the upper side of a quartz window are arranged on the microwave mode converter, the quartz window located in the microwave cavity is arranged below the microwave mode converter, a metal molybdenum stage is arranged on a sample stage in the microwave cavity, and a cooling water channel is arranged on the microwave cavity. The structure of the cavity, the sealing structure of the quartz window, heat dissipation and the like of the microwave plasma chemical vapor deposition device disclosed by the present invention are improved, so that the product quality of a diamond film produced by deposition is improved.
    Type: Application
    Filed: February 15, 2023
    Publication date: May 16, 2024
    Applicant: Wuhan Youmeike Automation Co., Ltd
    Inventors: Zhiwen KANG, Bingfeng CAI, Kangfu GUO
  • Patent number: 11808930
    Abstract: An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: November 7, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Patent number: 11682538
    Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: June 20, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Patent number: 11521826
    Abstract: An optical height detection system in a charged particle beam inspection system. The optical height detection system includes a projection unit including a modulated illumination source, a projection grating mask including a projection grating pattern, and a projection optical unit for projecting the projection grating pattern to a sample; and a detection unit including a first detection grating mask including a first detection grating pattern, a second detection grating mask including a second detection grating pattern, and a detection optical system for forming a first grating image from the projection grating pattern onto the first detection grating mask and forming a second grating image from the projection grating pattern onto the second detection grating masks. The first and second detection grating patterns at least partially overlap the first and second grating images, respectively.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: December 6, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Publication number: 20220351932
    Abstract: A system and a method for manipulating a beam of an Advanced Charge Controller module in different planes in an e-beam system are provided. Some embodiments of the system include a lens system configured to manipulate a beam in the tangential plane and the sagittal plane such that the beam spot is projected onto the wafer with high luminous energy. Some embodiments of the system include a lens system comprising at least two cylindrical lens.
    Type: Application
    Filed: August 4, 2020
    Publication date: November 3, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jian ZHANG, Ning YE, Zhiwen KANG, Yixiang WANG
  • Publication number: 20220328283
    Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.
    Type: Application
    Filed: August 20, 2020
    Publication date: October 13, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Jinmei YANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20220107176
    Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.
    Type: Application
    Filed: September 28, 2021
    Publication date: April 7, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Yan WANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20220084780
    Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.
    Type: Application
    Filed: November 22, 2021
    Publication date: March 17, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20210396683
    Abstract: An illumination unit comprising a first electromagnetic wave source including circuitry for outputting a first electromagnetic wave in a first direction to illuminate a first region of a sample; a second electromagnetic wave source including circuitry for outputting a second electromagnetic wave in a second direction substantially opposite to the first direction; and a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample.
    Type: Application
    Filed: September 20, 2019
    Publication date: December 23, 2021
    Inventors: Jian ZHANG, Yixiang WANG, Zhiwen KANG
  • Patent number: 11183360
    Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: November 23, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
  • Publication number: 20200294762
    Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.
    Type: Application
    Filed: September 25, 2018
    Publication date: September 17, 2020
    Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20200278524
    Abstract: An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.
    Type: Application
    Filed: September 25, 2018
    Publication date: September 3, 2020
    Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Publication number: 20200279715
    Abstract: An optical height detection system in a charged particle beam inspection system. The optical height detection system includes a projection unit including a modulated illumination source, a projection grating mask including a projection grating pattern, and a projection optical unit for projecting the projection grating pattern to a sample; and a detection unit including a first detection grating mask including a first detection grating pattern, a second detection grating mask including a second detection grating pattern, and a detection optical system for forming a first grating image from the projection grating pattern onto the first detection grating mask and forming a second grating image from the projection grating pattern onto the second detection grating masks. The first and second detection grating patterns at least partially overlap the first and second grating images, respectively.
    Type: Application
    Filed: September 21, 2018
    Publication date: September 3, 2020
    Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
  • Patent number: 9726817
    Abstract: Disclosed is a small-diameter polarization maintaining optical fiber, which relates to the field of special optical fibers. The small-diameter polarization maintaining optical fiber comprises a quartz optical fiber (5); the periphery thereof is provided with an inner coating (6) and an outer coating (8); the interior of the quartz optical fiber (5) is provided with an optical fiber core layer (1) and a quartz cladding (2); two stress zones (4) are arranged between the optical fiber core layer (1) and the quartz cladding (2); a buffer coating (7) is arranged between the inner coating (6) and the outer coating (8); the periphery of each stress zone (4) is provided with a buffer layer (3) which is concentric with the stress zone (4); when a working wavelength of a small-diameter polarization maintaining optical fiber is 1310 nm, the attenuation thereof reaches less than 0.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: August 8, 2017
    Assignee: FIBERHOME TELECOMMUNICATION TECHNOLOGIES CO., LTD.
    Inventors: Wenyong Luo, Zhijian Liu, Yili Ke, Qi Mo, Fuming Hu, Qiong Lei, Zhiwen Kang, Rong Dan, Lei Zhao