Patents by Inventor ZHIWEN KANG
ZHIWEN KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12217927Abstract: A system and a method for manipulating a beam of an Advanced Charge Controller module in different planes in an e-beam system are provided. Some embodiments of the system include a lens system configured to manipulate a beam in the tangential plane and the sagittal plane such that the beam spot is projected onto the wafer with high luminous energy. Some embodiments of the system include a lens system comprising at least two cylindrical lens.Type: GrantFiled: August 4, 2020Date of Patent: February 4, 2025Assignee: ASML Netherlands B.V.Inventors: Jian Zhang, Ning Ye, Zhiwen Kang, Yixiang Wang
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SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM
Publication number: 20250037966Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.Type: ApplicationFiled: October 9, 2024Publication date: January 30, 2025Applicant: ASML Netherlands B.V.Inventors: Jinmei YANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG -
Publication number: 20240402093Abstract: Systems, apparatuses, and methods for detecting a location of a positioned sample may include an electrostatic holder configured to hold a sample and form a gap area between an outside edge of the sample and a structure of the electrostatic holder when the electrostatic holder holds the sample, wherein the gap area is coated with a first coating configured to reflect a first wavelength of light with first brightness and to reflect a second wavelength of the light with second brightness, the first wavelength is within a predetermined range of wavelengths, the second wavelength is outside the predetermined range of wavelengths, and the first brightness is higher than the second brightness; a light source configured to direct the light at the gap area; and an optical detector configured to image the light reflected off the gap area.Type: ApplicationFiled: August 3, 2022Publication date: December 5, 2024Applicant: ASML Netherlands B.V.Inventors: Xiaodong MENG, Zhiwen KANG, Jian ZHANG, Kangsheng QIU
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Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
Patent number: 12142456Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.Type: GrantFiled: August 20, 2020Date of Patent: November 12, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Jinmei Yang, Jian Zhang, Zhiwen Kang, Yixiang Wang -
Publication number: 20240369356Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.Type: ApplicationFiled: July 17, 2024Publication date: November 7, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Yan WANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Patent number: 12072181Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.Type: GrantFiled: September 28, 2021Date of Patent: August 27, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Yan Wang, Jian Zhang, Zhiwen Kang, Yixiang Wang
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Publication number: 20240158910Abstract: A microwave plasma chemical vapor deposition device, including a microwave generator, an isolator, a 3-stub microwave tuner, a microwave mode converter, and a short-circuiting waveguide tuner connected successively is disclosed. A microwave antenna and an upper cooling air inlet stretching into a microwave cavity and corresponding to the upper side of a quartz window are arranged on the microwave mode converter, the quartz window located in the microwave cavity is arranged below the microwave mode converter, a metal molybdenum stage is arranged on a sample stage in the microwave cavity, and a cooling water channel is arranged on the microwave cavity. The structure of the cavity, the sealing structure of the quartz window, heat dissipation and the like of the microwave plasma chemical vapor deposition device disclosed by the present invention are improved, so that the product quality of a diamond film produced by deposition is improved.Type: ApplicationFiled: February 15, 2023Publication date: May 16, 2024Applicant: Wuhan Youmeike Automation Co., LtdInventors: Zhiwen KANG, Bingfeng CAI, Kangfu GUO
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Patent number: 11808930Abstract: An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.Type: GrantFiled: September 25, 2018Date of Patent: November 7, 2023Assignee: ASML Netherlands B.V.Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
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Patent number: 11682538Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.Type: GrantFiled: November 22, 2021Date of Patent: June 20, 2023Assignee: ASML Netherlands B.V.Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
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Patent number: 11521826Abstract: An optical height detection system in a charged particle beam inspection system. The optical height detection system includes a projection unit including a modulated illumination source, a projection grating mask including a projection grating pattern, and a projection optical unit for projecting the projection grating pattern to a sample; and a detection unit including a first detection grating mask including a first detection grating pattern, a second detection grating mask including a second detection grating pattern, and a detection optical system for forming a first grating image from the projection grating pattern onto the first detection grating mask and forming a second grating image from the projection grating pattern onto the second detection grating masks. The first and second detection grating patterns at least partially overlap the first and second grating images, respectively.Type: GrantFiled: September 21, 2018Date of Patent: December 6, 2022Assignee: ASML Netherlands B.V.Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
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Publication number: 20220351932Abstract: A system and a method for manipulating a beam of an Advanced Charge Controller module in different planes in an e-beam system are provided. Some embodiments of the system include a lens system configured to manipulate a beam in the tangential plane and the sagittal plane such that the beam spot is projected onto the wafer with high luminous energy. Some embodiments of the system include a lens system comprising at least two cylindrical lens.Type: ApplicationFiled: August 4, 2020Publication date: November 3, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Jian ZHANG, Ning YE, Zhiwen KANG, Yixiang WANG
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SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM
Publication number: 20220328283Abstract: A sensor may be used to measure a degree of tilt of a sample. The sensor may include an apparatus having a light source, first, second, and third optical elements, a lens, and an aperture. The first optical element may supply light from the light source toward the sample, and may supply light input into the first optical element from the sample toward the second optical element. The second optical element may supply light toward first and second sensing elements. An aperture may be arranged on a focal plane of the lens. A light beam incident on the first sensing element may be a reference beam.Type: ApplicationFiled: August 20, 2020Publication date: October 13, 2022Applicant: ASML Netherlands B.V.Inventors: Jinmei YANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG -
Publication number: 20220107176Abstract: An inspection apparatus for adjusting a working height for a substrate for multiple target heights is disclosed. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets that each reflect off a substrate. Each beamlet contains light of multiple wavelengths. The inspection apparatus includes multiple light reflecting components, wherein each light reflecting component is associated with one of the beamlets reflecting off the substrate and is configured to support a different target height for the substrate by detecting a height or a levelness of the substrate based on the beamlet reflecting off the substrate.Type: ApplicationFiled: September 28, 2021Publication date: April 7, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Yan WANG, Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Publication number: 20220084780Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.Type: ApplicationFiled: November 22, 2021Publication date: March 17, 2022Applicant: ASML Netherlands B.V.Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Publication number: 20210396683Abstract: An illumination unit comprising a first electromagnetic wave source including circuitry for outputting a first electromagnetic wave in a first direction to illuminate a first region of a sample; a second electromagnetic wave source including circuitry for outputting a second electromagnetic wave in a second direction substantially opposite to the first direction; and a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample.Type: ApplicationFiled: September 20, 2019Publication date: December 23, 2021Inventors: Jian ZHANG, Yixiang WANG, Zhiwen KANG
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Patent number: 11183360Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.Type: GrantFiled: September 25, 2018Date of Patent: November 23, 2021Assignee: ASML Netherlands B.V.Inventors: Jian Zhang, Zhiwen Kang, Yixiang Wang
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Publication number: 20200294762Abstract: An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.Type: ApplicationFiled: September 25, 2018Publication date: September 17, 2020Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Publication number: 20200278524Abstract: An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.Type: ApplicationFiled: September 25, 2018Publication date: September 3, 2020Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Publication number: 20200279715Abstract: An optical height detection system in a charged particle beam inspection system. The optical height detection system includes a projection unit including a modulated illumination source, a projection grating mask including a projection grating pattern, and a projection optical unit for projecting the projection grating pattern to a sample; and a detection unit including a first detection grating mask including a first detection grating pattern, a second detection grating mask including a second detection grating pattern, and a detection optical system for forming a first grating image from the projection grating pattern onto the first detection grating mask and forming a second grating image from the projection grating pattern onto the second detection grating masks. The first and second detection grating patterns at least partially overlap the first and second grating images, respectively.Type: ApplicationFiled: September 21, 2018Publication date: September 3, 2020Inventors: Jian ZHANG, Zhiwen KANG, Yixiang WANG
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Patent number: 9726817Abstract: Disclosed is a small-diameter polarization maintaining optical fiber, which relates to the field of special optical fibers. The small-diameter polarization maintaining optical fiber comprises a quartz optical fiber (5); the periphery thereof is provided with an inner coating (6) and an outer coating (8); the interior of the quartz optical fiber (5) is provided with an optical fiber core layer (1) and a quartz cladding (2); two stress zones (4) are arranged between the optical fiber core layer (1) and the quartz cladding (2); a buffer coating (7) is arranged between the inner coating (6) and the outer coating (8); the periphery of each stress zone (4) is provided with a buffer layer (3) which is concentric with the stress zone (4); when a working wavelength of a small-diameter polarization maintaining optical fiber is 1310 nm, the attenuation thereof reaches less than 0.Type: GrantFiled: November 3, 2015Date of Patent: August 8, 2017Assignee: FIBERHOME TELECOMMUNICATION TECHNOLOGIES CO., LTD.Inventors: Wenyong Luo, Zhijian Liu, Yili Ke, Qi Mo, Fuming Hu, Qiong Lei, Zhiwen Kang, Rong Dan, Lei Zhao