Patents by Inventor Zhong-Gui ZHANG

Zhong-Gui ZHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for compensating slit illumination uniformity
    Patent number: 9411240
    Abstract: A method for compensating a slit illumination uniformity includes executing a first lithography operation and recording an initial slit uniformity profile; executing a slit uniformity optimization process and recording an optimized slit uniformity profile; and offsetting the optimized slit uniformity profile to obtain a working slit uniformity profile such that the working slit uniformity profile has a mean value closest to that of the initial slit uniformity profile.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: August 9, 2016
    Assignee: UNITED MICROELETRONICS CORPORATION
    Inventor: Zhong-Gui Zhang
  • METHOD FOR COMPENSATING SLIT ILLUMINATION UNIFORMITY
    Publication number: 20150331328
    Abstract: A method for compensating a slit illumination uniformity includes executing a first lithography operation and recording an initial slit uniformity profile; executing a slit uniformity optimization process and recording an optimized slit uniformity profile; and offsetting the optimized slit uniformity profile to obtain a working slit uniformity profile such that the working slit uniformity profile has a mean value closest to that of the initial slit uniformity profile.
    Type: Application
    Filed: May 15, 2014
    Publication date: November 19, 2015
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventor: Zhong-Gui ZHANG