Abstract: A heat dissipation optimization method for silicon-based SU-8 thin film packaging, a molybdenum copper sheet is arranged on the back of the embedded chip, and the chip wiring and interconnection is realized on the front side of the silicon substrate through the metal pattern on the SU-8 photoresist, the silicon wafer thinning process on the back side exposes the molybdenum copper sheet from the surface of the silicon substrate and directly contacts the heat sink to achieve heat dissipation optimization; SU-8 photoresist as the packaging medium, and carries out the MEMS process in combination with the silicon substrate, so as to realize abundant three-dimensional structures and fulfill the requirements of high integration and miniaturization of packaging.

Abstract: A system for in line in situ validation of an air filter of an exhaust filter system including a scan head, a means for facilitating movement of said scan head in the XY plane, a means for externally controlling the movement of the scan head from outside the plenum of the exhaust filter system in the XY plane, and a means for coupling the scan head to the means for externally controlling the movement of the scan head, is provided. The system can also include a scanning arm, inside and outside magnetic couples, and rolling means to facilitate movement of the inside and outside magnetic couples. A method for in line in situ validation of an air filter in an exhaust filter system is also described, which involves the use of the system for in line in situ validation of air filters of an exhaust filter system.

Abstract: A system for in line in situ validation of an air filter of an exhaust filter system including a scan head, a means for facilitating movement of said scan head in the XY plane, a means for externally controlling the movement of the scan head from outside the plenum of the exhaust filter system in the XY plane, and a means for coupling the scan head to the means for externally controlling the movement of the scan head, is provided. The system can also include a scanning arm, inside and outside magnetic couples, and rolling means to facilitate movement of the inside and outside magnetic couples. A method for in line in situ validation of an air filter in an exhaust filter system is also described, which involves the use of the system for in line in situ validation of air filters of an exhaust filter system.