Patents by Inventor Zhonghua Dong
Zhonghua Dong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240116033Abstract: The present invention relates to the technical field of catalyst preparation, disclosing a preparation method and application of a coated vanadium-tungsten-titanium oxide monolithic SCR catalyst. The method includes the steps of mixing a vanadium oxide precursor, a tungsten oxide precursor, titanium dioxide, an inorganic adhesive, an organic adhesive and a macromolecular surfactant with deionized water and stirring them to obtain a thick liquid; adding a pH adjuster to the thick liquid to make its pH 1.5-4.5; impregnating a cordierite honeycomb carrier in the thick liquid to obtain a preliminarily-impregnated catalyst and dried and calcined the preliminarily-impregnated catalyst to obtain a finished catalyst. The method has advantages such as simple operation, easy repetition and short time-consuming, so it can be applied to exhaust gas post-treatment of a marine diesel engine, and provide a good choice for catalysts used to denitrify medium and high temperature exhausted gas from marine engines.Type: ApplicationFiled: December 14, 2023Publication date: April 11, 2024Inventors: Mingyu GUO, Yidan HUANG, Boqun LIU, Shaoping CUI, Shipei DONG, Siqi CHEN, Bin LIU, Yingjie ZHAO, Fang LIN, Zhonghua TIAN, Junjie ZHAO, Wei YE, Yanjie WEI, Zhipeng ZHANG
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Patent number: 11942304Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: July 1, 2022Date of Patent: March 26, 2024Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Publication number: 20240044820Abstract: Disclosed herein is an apparatus comprising: a source configured to emit charged particles, an optical system and a stage; wherein the stage is configured to support a sample thereon and configured to move the sample by a first distance in a first direction; wherein the optical system is configured to form probe spots on the sample with the charged particles; wherein the optical system is configured to move the probe spots by the first distance in the first direction and by a second distance in a second direction, simultaneously, while the stage moves the sample by the first distance in the first direction; wherein the optical system is configured to move the probe spots by the first distance less a width of one of the probe spots in an opposite direction of the first direction, after the stage moves the sample by the first distance in the first direction.Type: ApplicationFiled: October 10, 2023Publication date: February 8, 2024Applicant: ASML Netherlands B.V.Inventors: Kuo-Feng TSENG, Zhonghua DONG, Yixiang WANG, Zhong-wei CHEN
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Patent number: 11862427Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: September 13, 2022Date of Patent: January 2, 2024Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Patent number: 11815473Abstract: Disclosed herein is an apparatus comprising: a source configured to emit charged particles, an optical system and a stage; wherein the stage is configured to support a sample thereon and configured to move the sample by a first distance in a first direction; wherein the optical system is configured to form probe spots on the sample with the charged particles; wherein the optical system is configured to move the probe spots by the first distance in the first direction and by a second distance in a second direction, simultaneously, while the stage moves the sample by the first distance in the first direction; wherein the optical system is configured to move the probe spots by the first distance less a width of one of the probe spots in an opposite direction of the first direction, after the stage moves the sample by the first distance in the first direction.Type: GrantFiled: March 6, 2020Date of Patent: November 14, 2023Assignee: ASML Netherlands B.V.Inventors: Kuo-Feng Tseng, Zhonghua Dong, Yixiang Wang, Zhong-wei Chen
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Patent number: 11715619Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.Type: GrantFiled: April 4, 2022Date of Patent: August 1, 2023Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Weiming Ren, Zhonghua Dong, Zhongwei Chen
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Publication number: 20230178328Abstract: An apparatus includes a first charged particle beam manipulator positioned in a first layer configured to influence a charged particle beam and a second charged particle beam manipulator positioned in a second layer configured to influence the charged particle beam. The first and second charged particle beam manipulators may each include a plurality of electrodes having a first set of opposing electrodes and a second set of opposing electrodes. A first driver system electrically connected to the first set may be configured to provide a plurality of discrete output states to the first set. A second driver system electrically connected to the second set may be configured to provide a plurality of discrete output states to the second set. The first and second charged-particle beam manipulators may each comprise a plurality of segments; and a controller having circuitry configured to individually control operation of each of the plurality of segments.Type: ApplicationFiled: March 18, 2021Publication date: June 8, 2023Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Zhonghua DONG, Xiaoyu JI, Shahedul HOQUE, Weiming REN, Xuedong LIU, Guofan YE, Kuo-Chin CHIEN
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Publication number: 20230123152Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.Type: ApplicationFiled: October 20, 2022Publication date: April 20, 2023Applicant: ASML NETHERLANDS B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI, Kenichi KANAI
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Publication number: 20230116381Abstract: Apparatuses, systems, and methods for generating a beam for inspecting a wafer positioned on a stage in a charged particle beam system are disclosed. In some embodiments, a controller may include circuitry configured to classify a plurality of regions along a stripe of the wafer by type of region, the stripe being larger than a field of view of the beam, wherein the classification of the plurality of regions includes a first type of region and a second type of region; and scan the wafer by controlling a speed of the stage based on the type of region, wherein the first type of region is scanned at a first speed and the second type of region is scanned at a second speed.Type: ApplicationFiled: March 9, 2021Publication date: April 13, 2023Applicant: ASML Netherlands B.V.Inventors: Long MA, Zhonghua DONG, Te-Yu CHEN
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Patent number: 11594395Abstract: Detectors and detection systems are disclosed. According to certain embodiments, a detector comprises a substrate comprising a plurality of sensing elements including a first sensing element and a second sensing element, wherein at least the first sensing element is formed in a triangular shape. The detector may include a switching region configured to connect the first sensing 5 element and the second sensing element. There may also be provided a plurality of sections including a first section connecting a first plurality of sensing elements to a first output and a second section connecting a second plurality of sensing elements to a second output. The section may be provided in a hexagonal shape.Type: GrantFiled: March 21, 2019Date of Patent: February 28, 2023Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong
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Publication number: 20230005707Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: ApplicationFiled: September 13, 2022Publication date: January 5, 2023Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI
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Publication number: 20220415608Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: ApplicationFiled: July 1, 2022Publication date: December 29, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Yongxin WANG, Zhonghua DONG, Rui-Ling LAI
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Publication number: 20220375716Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.Type: ApplicationFiled: April 4, 2022Publication date: November 24, 2022Applicant: ASML Netherlands B.V.Inventors: Yongxin WANG, Weiming REN, Zhonghua DONG, Zhongwei CHEN
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Patent number: 11508547Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.Type: GrantFiled: June 7, 2019Date of Patent: November 22, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai, Kenichi Kanai
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Patent number: 11476085Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: September 14, 2018Date of Patent: October 18, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Publication number: 20220301811Abstract: An improved apparatus and method for enhancing an image, and more particularly an apparatus and method for enhancing an image through cross-talk cancellation in a multiple charged-particle beam inspection are disclosed. An improved method for enhancing an image includes acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system. The first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident. The method includes reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam. The method further includes generating a first image corresponding to first secondary electron beam after reduction.Type: ApplicationFiled: August 20, 2020Publication date: September 22, 2022Inventors: Wei FANG, Lingling PU, Bo WANG, Zhonghua DONG, Yongxin WANG
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Patent number: 11430629Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.Type: GrantFiled: September 14, 2018Date of Patent: August 30, 2022Assignee: ASML Netherlands B.V.Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
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Patent number: 11295930Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.Type: GrantFiled: February 1, 2018Date of Patent: April 5, 2022Assignee: ASML NETHERLANDS B.V.Inventors: Yongxin Wang, Weiming Ren, Zhonghua Dong, Zhongwei Chen
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Publication number: 20220068590Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.Type: ApplicationFiled: December 19, 2019Publication date: March 3, 2022Inventors: Ying LUO, Zhonghua DONG, Xuehui YIN, Long DI, Nianpei DENG, Wei FANG, Lingling PU, Ruochong FEI, Bohang ZHU, Yu LIU
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Patent number: D987556Type: GrantFiled: September 29, 2020Date of Patent: May 30, 2023Assignee: Guangdong Marshell Electric Vehicle CO., LTDInventor: Zhonghua Dong