Abstract: A reciprocating rotary CVD apparatus and a method for applying same. The reciprocating rotary CVD apparatus includes a cavity, a wafer heating base, a rotating apparatus. The rotating apparatus is located outside the cavity and includes a rotating power mechanism and a rotating sealing mechanism, and the rotating sealing mechanism includes a rotating member and a fixed member; the fixed member is fixedly and hermetically connected to the cavity, the rotating member is fixedly and hermetically connected to the wafer heating base, the rotating member is movably and hermetically connected to the fixed member, and the rotating member is connected to the rotating power mechanism, to drive, by using the rotating power mechanism, the rotating member and the wafer heating base to perform reciprocating rotation. In the present invention, the rotating apparatus rotates, to improve the uniformity of thin film deposition in a circumferential direction of a wafer.

Abstract: A system and process for melamine production by gas-phase quenching method and its process are provided. The said system includes a urea scrubber, after which a fluidized bed reactor, a hot-air cooler, a hot-air filter, a crystallizer and a melamine collector are installed in series successively, where the said melamine collector is connected to the said urea scrubber and the said fluidized bed reactor is connected to a carrier gas pre-heater which is connected to a carrier gas compressor; the said system further includes a gas-liquid separator which is connected to the said urea scrubber which is connected to a crystallizer; wherein a cool air blower is provided between the said gas-liquid separator and the crystallizer. The production system of the invention has the advantages of high productivity, stable operation, low energy consumption, low investment and high economic value of tail gas.

Abstract: A system and process for melamine production by gas-phase quenching method and its process are provided. The said system includes a urea scrubber, after which a fluidized bed reactor, a hot-air cooler, a hot-air filter, a crystallizer and a melamine collector are installed in series successively, where the said melamine collector is connected to the said urea scrubber and the said fluidized bed reactor is connected to a carrier gas pre-heater which is connected to a carrier gas compressor; the said system further includes a gas-liquid separator which is connected to the said urea scrubber which is connected to a crystallizer; wherein a cool air blower is provided between the said gas-liquid separator and the crystallizer. The production system of the invention has the advantages of high productivity, stable operation, low energy consumption, low investment and high economic value of tail gas.