Patents by Inventor Zhouxing Luo

Zhouxing Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for isolating defects in an integrated circuit near field scanning photon emission microscopy
    Patent number: 5981967
    Abstract: An apparatus for isolating defects in an integrated circuit using near field scanning photon emission microscopy comprises a photon collector 10 which receives emitted photons 16 from a surface 14 of an energized or biased integrated circuit 12, a CCD camera 20 for converting the photons into an emission image 22, and an optical fiber 18 coupling the CCD camera 20 to the photon collector 10, so that the optical fiber transmits photons from the collector to the CCD camera. As a result, defects in integrated circuits can be isolated with greater resolution than currently available using conventional far field photon emission microscopy.
    Type: Grant
    Filed: December 17, 1997
    Date of Patent: November 9, 1999
    Assignee: Texas Instruments Incorporated
    Inventor: Zhouxing Luo