Patents by Inventor Zhoying L. Zhang

Zhoying L. Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for fabricating submicron single crystal electromechanical structures
    Patent number: 5393375
    Abstract: A process for fabricating submicron movable mechanical structures utilizes chemically assisted ion beam etching and reactive ion etching which are independent of crystal orientation. The process provides released mechanical structures which may be of the same material or of different materials than the surrounding substrate, and a nitride coating may be provided on the released structure for optical applications.
    Type: Grant
    Filed: December 22, 1993
    Date of Patent: February 28, 1995
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Noel C. MacDonald, Zhoying L. Zhang, Gyorgy A. Porkolab