Patents by Inventor Zhumin HAN

Zhumin HAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EDGE RINGS WITH INSTEPS AND OVERSIZED HOLES FOR PREVENTING LIFT PIN CONTACT THEREWITH IN SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20260088263
    Abstract: An edge ring for a substrate support is provided. The edge ring includes an annular-shaped body and an instep. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines a first top surface, a second top surface, a lower surface, a radially inner surface, and a radially outer surface; and an instep. The instep is disposed at an upper radially inner portion of the annular-shaped body and transitions from the first top surface to the second top surface. The annular-shaped body includes a first hole configured for passage of a first lift pin, the first hole being oversized to prevent the annular-shaped body from contacting the first lift pin.
    Type: Application
    Filed: December 1, 2025
    Publication date: March 26, 2026
    Inventors: Alejandro SANCHEZ, Grayson FORD, Darrell EHRLICH, Aravind ALWAN, Kevin LEUNG, Anthony CONTRERAS, Zhumin HAN, Raphael CASAES, Joanna WU
  • Edge rings providing kinematic coupling and corresponding substrate processing systems
    Patent number: 12500068
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Grant
    Filed: October 5, 2023
    Date of Patent: December 16, 2025
    Assignee: Lam Research Corporation
    Inventors: Alejandro Sanchez, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Leung, Anthony Contreras, Zhumin Han, Raphael Casaes, Joanna Wu
  • REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
    Publication number: 20240038504
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Application
    Filed: October 5, 2023
    Publication date: February 1, 2024
    Inventors: Alejandro SANCHEZ, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Leung, Anthony Contreras, Zhumin Han, Raphael Casaes, Joanna Wu
  • Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
    Patent number: 11798789
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: October 24, 2023
    Assignee: Lam Research Corporation
    Inventors: Alejandro Sanchez, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Leung, Anthony Contreras, Zhumin Han, Raphael Casaes, Joanna Wu
  • REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
    Publication number: 20200395195
    Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.
    Type: Application
    Filed: September 10, 2018
    Publication date: December 17, 2020
    Inventors: Alejandro SANCHEZ, Grayson FORD, Darrell EHRLICH, Aravind ALWAN, Kevin LEUNG, Anthony CONTRERAS, Zhumin HAN, Raphael CASAES, Joanna WU