Patents by Inventor Zi Lin

Zi Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12181798
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a photoresist layer over a substrate, wherein the photoresist layer includes a metal-containing chemical; performing an exposing process to the photoresist layer; and performing a first developing process to the photoresist layer using a first developer, thereby forming a patterned resist layer, wherein the first developer includes a first solvent and a chemical additive to remove metal residuals generated from the metal-containing chemical.
    Type: Grant
    Filed: August 9, 2023
    Date of Patent: December 31, 2024
    Assignee: TAIWAIN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: An-Ren Zi, Joy Cheng, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20240419069
    Abstract: A method for forming a semiconductor device is provided. The method includes forming a photoresist layer comprising an organometallic compound over a substrate. The organometallic compound includes a metal core, at least one hydrolyzable ligand bonded to the metal core, and at least one photoacid generator ligand bonded to the metal core. The method further includes selectively exposing the photoresist layer to radiation and developing the photoresist layer to form a pattern in the photoresist layer.
    Type: Application
    Filed: June 15, 2023
    Publication date: December 19, 2024
    Inventors: An-Ren ZI, Yen-Yu KUO, Ching-Yu CHANG, Chin-Hsiang LIN
  • Publication number: 20240395566
    Abstract: A semiconductor device and method that comprise a first dielectric layer over a encapsulant that encapsulates a via and a semiconductor die is provided. A redistribution layer is over the first dielectric layer, and a second dielectric layer is over the redistribution layer, and the second dielectric layer comprises a low-temperature polyimide material.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 28, 2024
    Inventors: Zi-Jheng Liu, Yu-Hsiang Hu, Jo-Lin Lan, Sih-Hao Liao, Chen-Cheng Kuo, Hung-Jui Kuo, Chung-Shi Liu, Chen-Hua Yu, Meng-Wei Chou
  • Publication number: 20240377731
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a photoresist layer over a substrate, wherein the photoresist layer includes a metal-containing chemical; performing an exposing process to the photoresist layer; and performing a first developing process to the photoresist layer using a first developer, thereby forming a patterned resist layer, wherein the first developer includes a first solvent and a chemical additive to remove metal residuals generated from the metal-containing chemical.
    Type: Application
    Filed: July 22, 2024
    Publication date: November 14, 2024
    Inventors: An-Ren Zi, Joy Cheng, Ching-Yu Chang, Chin-Hsiang Lin
  • Patent number: 12117892
    Abstract: A computing system automatically manages error reports. Each error report specifies an error that occurred within a subsystem of the computing system. A received error report is added into a root cause grouping. Each root cause grouping contains error reports having error types traceable to a same root cause. A deployment time at which the subsystem corresponding to the error report was deployed within the computing system is determined. A severity score for the root cause grouping is generated as a function of the deployment time. The severity score inversely correlates to a time period length between the deployment time and the occurrence time of the error. The root cause grouping is assigned to a ranked error container of a plurality of ranked error containers based on the generated severity score. Each ranked error container contains root cause groupings having severity scores within a specified score range.
    Type: Grant
    Filed: August 1, 2022
    Date of Patent: October 15, 2024
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Wenjing Wang, Youquan Su, Zi Ye, Ya Lin, Shirley F. Tan, Ashwin Shrinivas, Mathieu Baptiste Demarne, Grant R. Culbertson, Yvonne Mckay, Thomas R. Michaels, Jr., Barton K. Duncan, Zhirui Yuan
  • Publication number: 20240329535
    Abstract: A method of forming semiconductor device includes depositing a coating layer over a substrate, forming a photoresist layer over the coating layer, exposing the photoresist layer to actinic radiation, and developing the photoresist layer to form a patterned photoresist layer. The coating layer includes a polymer containing a first unit having a pendant hydrogen donor group capable of producing a hydrogen radical upon exposure to the actinic radiation or heat, and a second unit having a pendant water donor group capable of producing water upon exposure to the actinic radiation or heat.
    Type: Application
    Filed: July 28, 2023
    Publication date: October 3, 2024
    Inventors: Yen-Yu KUO, An-Ren ZI, Chen-Yu LIU, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 12106961
    Abstract: A method for forming a semiconductor device is provided. The method includes applying a photoresist composition over a substrate, thereby forming a photoresist layer over the substrate; performing a first baking process to the photoresist layer; exposing the photoresist layer to an extreme ultraviolet (EUV) radiation, thereby forming a pattern therein; performing a second baking process to the photoresist layer; and developing the photoresist layer having the pattern therein using a developer, thereby forming a patterned photoresist layer. The first baking process and the second baking process are conducted under an ambient atmosphere having a humidity level ranging from 55% to 100%.
    Type: Grant
    Filed: January 21, 2022
    Date of Patent: October 1, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: An-Ren Zi, Yahru Cheng, Ching-Yu Chang, Chin-Hsiang Lin
  • Patent number: 12094728
    Abstract: A semiconductor device and method that comprise a first dielectric layer over a encapsulant that encapsulates a via and a semiconductor die is provided. A redistribution layer is over the first dielectric layer, and a second dielectric layer is over the redistribution layer, and the second dielectric layer comprises a low-temperature polyimide material.
    Type: Grant
    Filed: May 26, 2023
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Zi-Jheng Liu, Yu-Hsiang Hu, Jo-Lin Lan, Sih-Hao Liao, Chen-Cheng Kuo, Hung-Jui Kuo, Chung-Shi Liu, Chen-Hua Yu, Meng-Wei Chou
  • Publication number: 20240297040
    Abstract: A method of manufacturing a semiconductor device includes forming a first protective layer over an edge portion of a first main surface of a semiconductor substrate. A metal-containing photoresist layer is formed over the first main surface of the semiconductor substrate. The first protective layer is removed, and the metal-containing photoresist layer is selectively exposed to actinic radiation. A second protective layer is formed over the edge portion of the first main surface of the semiconductor substrate. The selectively exposed photoresist layer is developed to form a patterned photoresist layer, and the second protective layer is removed.
    Type: Application
    Filed: May 7, 2024
    Publication date: September 5, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: An-Ren ZI, Ching-Yu CHANG, Chin-Hsiang LIN
  • Publication number: 20240290746
    Abstract: A semiconductor device includes a semiconductor die having a die surface, in which the die surface includes a bond pad. A ball bond has a distal surface and flattened-disk shape extending from the distal surface and terminating in a proximal surface spaced apart from the distal surface. The distal surface is coupled to the bond pad and a channel extends a depth into the proximal surface surrounding a central portion of the proximal surface. A bond wire extending from the central portion of the proximal surface, in which the channel is spaced apart from and surrounds the bond wire.
    Type: Application
    Filed: February 24, 2023
    Publication date: August 29, 2024
    Inventors: Ye ZHUANG, Zi Qi WANG, Xiao Lin KANG, Tingting YU, Jiafeng LIAO, Xiaoling KANG
  • Publication number: 20240264526
    Abstract: A photoresist developer includes a solvent having Hansen solubility parameters of 15<?d<25, 10<?p<25, and 6<?p<30; an acid having an acid dissociation constant, pKa, of ?15<pKa<4, or a base having a pKa of 40>pKa>9.5; and a chelate.
    Type: Application
    Filed: April 10, 2024
    Publication date: August 8, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: An-Ren ZI, Chin-Hsiang LIN, Ching-Yu CHANG, Yahru CHENG
  • Patent number: 12051620
    Abstract: A method for forming a semiconductor structure includes forming a gate structure on a substrate; depositing a first dielectric layer over the gate structure; depositing a second dielectric layer over the first dielectric layer and having a different density than the first dielectric layer; performing a first etching process on the first and second dielectric layers to form a trench; performing a second etching process on the first and second dielectric layers to modify the trench; filling a conductive material in the modified trench.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: July 30, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Chang Sun, Po-Chin Chang, Akira Mineji, Zi-Wei Fang, Pinyen Lin
  • Publication number: 20240250060
    Abstract: An example semiconductor package comprises a semiconductor die having a top surface, a bond pad formed on the top surface, a bond wire having a first end and a second end, wherein the first end is attached to the bond pad. The semiconductor package having a contact pad, wherein the second end of the wire bond is attached to the contact pad by a stitch bond, the stitch bond having a plateau region formed between a cut end and a ramped portion, wherein a bottom surface of the plateau region forms an attachment to the contact pad.
    Type: Application
    Filed: January 24, 2023
    Publication date: July 25, 2024
    Inventors: Ye Zhuang, Huo Yun Duan, Zi Qi Wang, Xiao Lin Kang, Xiaoling Kang, Tingting Yu
  • Publication number: 20230236404
    Abstract: A system for quantitative differential phase contrast microscopy with isotropic transfer function utilizes a modulation mechanism to create a detection light field having a radial or other axial orientation of optical intensity gradient or other distribution. A condenser generates an off-axis light field to project onto an object under examination, thereby generating an object light field, which is then guided to an image capturing device through an objective lens for capturing images. A differential phase contrast algorithm is applied to the images for obtaining a phase, thereby a depth information corresponding to the phase can be obtained to reconstruct the surface profile of the object.
    Type: Application
    Filed: March 15, 2023
    Publication date: July 27, 2023
    Inventors: YUAN LUO, YU-HSUAN CHUANG, YU-ZI LIN
  • Patent number: 11624900
    Abstract: A system for quantitative differential phase contrast microscopy with isotropic transfer function utilizes a modulation mechanism to create a detection light field having a radial or other axial orientation of optical intensity gradient or other distribution. A condenser generates an off-axis light field to project onto an object under examination, thereby generating an object light field, which is then guided to an image capturing device through an objective lens for capturing images. A differential phase contrast algorithm is applied to the images for obtaining a phase, thereby a depth information corresponding to the phase can be obtained to reconstruct the surface profile of the object.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: April 11, 2023
    Assignees: NATIONAL TAIWAN UNIVERSITY, YONGLIN HEALTHCARE FOUNDATION
    Inventors: Yuan Luo, Yu-Hsuan Chuang, Yu-Zi Lin
  • Publication number: 20220356288
    Abstract: A peptide-imprinted conductive polymer and use thereof is provided, especially a peptide-imprinted conductive polymer including conductive polymer monomer(s), two-dimensional (2D) material(s), and a small peptide fragment of ?-synuclein as template. The peptide-imprinted conductive polymer has high sensibility, detects ?-synuclein at low concentrations, thus allowing early diagnosis and treatment of Parkinson's disease.
    Type: Application
    Filed: July 13, 2021
    Publication date: November 10, 2022
    Inventors: Hung-Yin Lin, Mei-Hwa Lee, Chien-Hsin Yang, Zi-Lin Su
  • Publication number: 20220104365
    Abstract: The invention discloses a substrate storage apparatus having a detecting device detachably connecting to an outer pod. The detecting device includes a sensing member having a sensing terminal, a cavity and a sensor. The sensing terminal detachably connects to the outer pod such that the sensing terminal exposes in an accommodating space inside of the outer pod. The cavity receiving the sensor extends to an outside of the outer pod and the accommodating space. The cavity communicates with the accommodating space through the sensing terminal, allowing the sensor to read information regarding the accommodating space.
    Type: Application
    Filed: July 28, 2021
    Publication date: March 31, 2022
    Inventors: Ming-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh, Yun-Zi Lin
  • Publication number: 20210382072
    Abstract: The present invention discloses an ?-synuclein sensing film, a manufacturing method and a use thereof. The ?-synuclein sensing film comprises a base plate and plural ?-synuclein sensing polymers polymerized on the base plate. Each of the plural ?-synuclein sensing polymers has plural ?-synuclein detection holes on a surface thereof. The plural ?-synuclein sensing polymers are manufactured by electropolymerization, and the plural ?-synuclein detection holes are imprinted by an ?-synuclein peptide. A sample to be tested can be applied to the ?-synuclein sensing film for detecting the ?-synuclein therein.
    Type: Application
    Filed: May 24, 2021
    Publication date: December 9, 2021
    Inventors: HUNG-YIN LIN, SHYH-CHYANG LUO, MEI-HWA LEE, ZI-LIN SU
  • Publication number: 20210191099
    Abstract: A system for quantitative differential phase contrast microscopy with isotropic transfer function utilizes a modulation mechanism to create a detection light field having a radial or other axial orientation of optical intensity gradient or other distribution. A condenser generates an off-axis light field to project onto an object under examination, thereby generating an object light field, which is then guided to an image capturing device through an objective lens for capturing images. A differential phase contrast algorithm is applied to the images for obtaining a phase, thereby a depth information corresponding to the phase can be obtained to reconstruct the surface profile of the object.
    Type: Application
    Filed: December 24, 2019
    Publication date: June 24, 2021
    Inventors: YUAN LUO, YU-HSUAN CHUANG, YU-ZI LIN
  • Patent number: 11023210
    Abstract: In an approach to generating program analysis rules, one or more computer processors identify one or more unassociated code standard documents. The one or more computer processors feed the one or more unassociated code standard documents into a cognitive model, wherein the cognitive model utilizes one or more historical code standard documents based on the unassociated code standard documents and associated program analysis rules based on the unassociated code standard documents, wherein the historical code standard documents are natural language documents and the program analysis rules are programmatic. The one or more computer processors generate, based on one or more calculations by the cognitive model, one or more program analysis rules. The one or more computer processors correct one or more programmatic errors or one or more stylistic errors based on the generated one or more program analysis rules.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: June 1, 2021
    Assignee: International Business Machines Corporation
    Inventors: Yu Li, Zi Lin Zhang, Yingyi Wang, Miao Guo, Yi Bin Wang, Yao Xing Li