Abstract: Provided are a dark-field confocal microscopic measurement apparatus and method based on frequency mismatch demodulation, relating to a dark-field confocal microscopic measurement apparatus and method. The problems that lateral and axial resolutions are affected and the stability of a microscopic system is reduced because the traditional nondestructive testing technology of subsurface defects in dark-field confocal microscopic measurement relies on a complex beam shaping mechanism are solved. The apparatus includes a dual-channel waveform generator, a modulated illumination module, an optical scanning module, a mismatch demodulation module, and an axial displacement table. A sample is placed on the axial displacement table, and one channel of the dual-channel waveform generator is connected to the modulated illumination module.

Abstract: This application relates to the technical field of confocal microscopy measurement, and provides a dark-field confocal microscopy measurement apparatus and method based on multi-fractional angular momentum demodulation. The apparatus includes a modulated illumination module and a signal collection and demodulation module. The modulated illumination module obtains vortex light with different fractional orders through modulation using vortex phase patterns with different fractional orders, so as to scan a to-be-measured sample. The vortex light with different fractional orders irradiates the to-be-measured sample and is reflected out. The signal collection and demodulation module collects the reflected light and generates dark-field images, and finally performs cross-correlation processing on the dark-field images generated under the vortex light with different fractional orders, to obtain high SNR data.

Abstract: Disclosed are a dark-field confocal microscopic measurement apparatus and method based on vortex dichroism. The apparatus includes an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module; an array vortex wave plate of the array vortex light generation module generates vortex light to illuminate a sample of the array vortex light illumination module; and the array dark-field confocal detection module extracts scattering signals, and identifies differences between scattering signals collected under the illumination of opposite-order vortex light.

Abstract: This application relates to the technical field of confocal microscopy measurement and provides a dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation. The apparatus includes a time-varying modulated illumination module, an optical scanning module, a signal collection and demodulation module, a function generator, and a sample platform. The function generator is separately connected with. The time-varying modulated illumination module is configured to emit fractional-order vortex light to the optical scanning module. The optical scanning module is configured to transmit the fractional-order vortex light to the to-be-measured sample on the sample platform and transmit a reflected light signal to the signal collection and demodulation module.

Abstract: Provided are a dark-field confocal microscopy measurement apparatus and method.

Abstract: This application provides a vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation. An opposite-order vortex beam generation module is configured to generate a mixed vortex beam, a sample scanning module is configured to irradiate a scanning position of a to-be-measured sample by using the mixed vortex beam, to obtain a sample reflection beam. A spiral transformation module is configured to spatially separate the sample reflection beam to obtain spatially separated beams. A multi-order detection module is configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position. When the scanning position of the to-be-measured sample is defect-free, the vortex dichroism signal is zero. Conversely, when defects are present at the scanning position, the vortex dichroism signal is non-zero. The positive and negative the vortex dichroism signal respectively correspond to the left-handed and right-handed chirality of the defects.

Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately.

Abstract: Disclosed are a dark-field confocal microscopic measurement apparatus and method based on vortex dichroism. The apparatus includes an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module; an array vortex wave plate of the array vortex light generation module generates vortex light to illuminate a sample of the array vortex light illumination module; and the array dark-field confocal detection module extracts scattering signals, and identifies differences between scattering signals collected under the illumination of opposite-order vortex light.

Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately.