Patents by Inventor Zijin YAN

Zijin YAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250072061
    Abstract: Provided are a semiconductor device with decreased source and drain resistance and a manufacturing method. The semiconductor device includes a substrate and multiple three-dimensional semiconductor device arrays. The three-dimensional semiconductor device arrays are on the substrate, and the three-dimensional semiconductor device arrays are separated by isolation grooves. Each three-dimensional semiconductor device array includes a plurality of device layers in a vertical direction, each device layer includes a stack of a source/drain layer, a channel layer and a source/drain layer, and an end face of the source/drain layer adjacent to the isolation groove is metallized. The three-dimensional semiconductor device array further includes a plurality of gate stacks arranged in an array, the gate stack penetrates each device layer in the vertical direction and includes a gate material and a gate dielectric layer, and a device unit is defined at an intersection of the gate stack and the device layer.
    Type: Application
    Filed: April 30, 2024
    Publication date: February 27, 2025
    Inventors: Zijin YAN, Huilong ZHU
  • Publication number: 20240407163
    Abstract: Provided are a NOR-type memory device, a manufacturing method, and an electronic device. The device includes: a plurality of gate stacks extending vertically on a substrate, wherein the gate stack includes a first gate conductor layer and a first filling layer; at least one device layer surrounding a periphery of the gate stack and extending along a sidewall of the gate stack; and a single-crystal vertical channel on a side of the device layer close to the gate stack and in contact with the first filling layer. At least one side surface of the gate stack in the vertical direction is a (100) or (110) crystal plane; and/or the body region includes a second filling layer or the body region includes a second gate conductor layer and a third filling layer, wherein at least one of first and third filling layers is a storage functional layer.
    Type: Application
    Filed: November 9, 2023
    Publication date: December 5, 2024
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Zijin YAN, Huilong ZHU