Abstract: Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.

Abstract: A nano-imprinting template, a system, and an imprinting method are provided. The nano-imprinting template (10) comprises: a first baseplate (100) transparent to ultraviolet light; an imprinting pattern structure (105) formed on the first surface of the first baseplate (100); a heating element (110) formed on the second surface, opposite to the first surface, of the first baseplate (100), wherein the heating element (110) is transparent to ultraviolet light; and a first electrode pair (115) formed on the second surface and used for supplying a current applied by an external power supply to the heating element (110) so as to make the heating part (110) generate heat. The nano-imprinting template (10) and the system seamlessly integrate an ultraviolet curing nano-imprinting technology with a thermoplastic nano-imprinting technology, which have the advantages of small size of equipment, low cost, simple process and the like.