Patents by Inventor Zixuan Feng

Zixuan Feng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11624126
    Abstract: Disclosed herein methods of forming an Al—Ga containing film comprising: a) exposing a substrate comprising a ?-Ga2O3, wherein the substrate has a (100) or (?201) orientation, to a vapor phase comprising an aluminum precursor and a gallium precursor; and b) forming a ?-(AlxGa1-x)2O3 thin film by a chemical vapor deposition at predetermined conditions and wherein x is 0.01?x?0.7. Also disclosed herein are devices comprising the inventive films.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: April 11, 2023
    Assignee: Ohio State Innovation Foundation
    Inventors: Hongping Zhao, A F M Anhar Uddin Bhuiyan, Zixuan Feng
  • Publication number: 20210388526
    Abstract: Disclosed herein methods of forming an Al—Ga containing film comprising: a) exposing a substrate comprising a ?-Ga2O3, wherein the substrate has a (100) or (?201) orientation, to a vapor phase comprising an aluminum precursor and a gallium precursor; and b) forming a ?-(AlxGa1-x)2O3 thin film by a chemical vapor deposition at predetermined conditions and wherein x is 0.01?x?0.7. Also disclosed herein are devices comprising the inventive films.
    Type: Application
    Filed: April 15, 2021
    Publication date: December 16, 2021
    Inventors: Hongping Zhao, A F M Anhar Uddin Bhuiyan, Zixuan Feng