Abstract: In example embodiments, a SOT-based magnetic rotary position sensor includes two spin Hall anomalous Hall effect (SHAHE) sensors, two spin Hall magnetoresistance (SMR) sensors or two unidirectional spin Hall magnetoresistance (USMR) sensors. In embodiments using SHAHE sensors, the sensors may be structured as Hall crosses formed from a film stack including a FM/heavy metal (HM) bi-layer or other SOT-generating layers. The current axes of the Hall crosses are orthogonally aligned. In embodiments using SMR or USMR sensors, the sensors may be structured as Wheatstone bridges including four SMR or USMR sensing elements each formed from a film stack including a FM/HM bi-layer or other SOT-generating layers. The field sensing axes of the Wheatstone bridges are orthogonally aligned.

Abstract: The invention relates to magnetic sensor comprising a sensor element that is able to generate a spin-orbit torque (SOT). The SOT acts as a transverse bias field to set a proper working point for the sensor and so ensure that it responds linearly to an external field with maximized sensitivity. It also functions as a longitudinal bias field to suppress domain wall nucleation and propagation. The use of SOT effective field for biasing not only simplifies the sensor structure but also makes it possible to make an ultrathin and semi-transparent magnetic sensor.